Zobrazeno 1 - 10
of 35
pro vyhledávání: '"Armin Bayer"'
Publikováno v:
Applied Physics A. 107:795-800
An EUV reflectometer for the analysis of surfaces and thin films regarding refractive index, surface roughness, and mass density at the wavelength of 12.98 nm was developed. The setup uses a laser produced plasma source with an oxygen gas puff target
Publikováno v:
X-Ray Optics and Instrumentation. 2010:1-9
We present an overview on the EUV/XUV activities of the Laser-Laboratorium Göttingen based on table-top laser-produced plasma (LPP) sources. As target materials, gaseous jets of noble gases or solid Gold are employed. In order to obtain high EUV flu
Autor:
Klaus Mann, Peter Großmann, Michael Reese, Armin Bayer, Hans-Ulrich Krebs, Tobias Liese, Bernd Schäfer
Publikováno v:
Applied Physics A. 102:85-90
The focusing properties of a one-dimensional multilayer Laue lens (MLL) were investigated using monochromatic soft X-ray radiation from a table-top, laser-produced plasma source. The MLL was fabricated by a focused ion beam (FIB) structuring of pulse
Publikováno v:
SPIE Proceedings.
Lens heating due to absorbed UV laser radiation can diminish the achievable spatial resolution of the lithographic process in semiconductor wafer steppers. At the Laser Lab Gottingen a measurement system for quantitative registration of this thermal
Publikováno v:
SPIE Proceedings.
As a consequence of the steadily increasing EUV powers and radiation doses, damage and degradation testing of EUV optical elements has become an important issue. In this contribution we report on first damage tests on optics and detectors for the wav
We have investigated ablation of polymers with radiation of 13.5 nm wavelength, using a table-top laser produced plasma source based on solid gold as target material. A Schwarzschild objective with Mo/Si multilayer coatings was adapted to the source,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::fab33606808cc19a1bcb54b4a40e85c1
http://resolver.sub.uni-goettingen.de/purl?gs-1/7115
http://resolver.sub.uni-goettingen.de/purl?gs-1/7115
Autor:
Uwe Leinhos, Armin Bayer, Klaus R. Mann, Jens-Oliver Dette, Federico Petazzi, Denny Wernham, Matthias Schöneck, Jorge Alves, Adrian Tighe, Dominique Thibault, Martin Endemann
Publikováno v:
SPIE Proceedings.
Photon-induced contamination of optical surfaces is a major obstacle for space-bound laser applications. At Laser-Laboratorium Gottingen, a setup was developed that allows monitoring transmission, reflection and fluorescence of laser-irradiated optic
Autor:
Klaus Mann, Federico Pettazzi, Armin Bayer, Denny Wernham, Martin Endemann, Dominique Thibault, Uwe Leinhos
Publikováno v:
SPIE Proceedings.
The European Space Agency ESA is running a series of earth observation missions. In order to perform global windprofile observation based on Doppler-LIDAR, the satellite ADM-Aelolus will be launched in April 2011 and injected into an orbit 400 km abo
Publikováno v:
Optics express. 18(5)
We present first damage threshold investigations on EUV mirrors and substrate materials using a table-top laser produced plasma source. A Schwarzschild objective with Mo/Si multilayer coatings for the wavelength of 13.5 nm was adapted to the source,
Publikováno v:
SPIE Proceedings.
We present first damage threshold investigations on EUV mirrors and substrate materials using a table-top laser produced plasma source. A Schwarzschild objective with Mo/S i multilayer coatings for the wavelength of 13.5 nm was adapted to the source,