Application of micromachining technology for bio-inspired and pressure sensing microsystems

Autor: Argyrakis, Petros

The main body of this thesis focuses on the fabrication of micro-electro-mechanical (MEM) fluidic flow sensor for integration with large scale integration (LSI) neuron circuit and robot. The proposed MEM sensor consists of a) piezoresistive wheatston

Externí odkaz: http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.640588

Design, fabrication, and testing of 3C-SiC sensors for high temperature applications.

Autor: Pozzi, Michele, Harris, Alun J., Burdess, James S., Argyrakis, Petros, Lee, Kin K., Cheung, Rebecca, Phelps, Gordon J., Wright, Nicholas G.

Publikováno v: Proceedings of SPIE; Nov2007 Part 2, Issue 1, p68001S-68001S-10, 10p

Dry etch release processes for micromachining applications.

Autor: Tongtong Zhu, Argyrakis, Petros, Mastropaolo, Enrico, King Kiong Lee, Cheung, Rebecca

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Nov/Dec2007, Vol. 25 Issue 6, p2553-2557, 5p, 2 Diagrams, 4 Graphs