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Publikováno v:
Plasma Processes and Polymers. 8:401-408
Composite thin films are deposited from acetylene in a microwave multipolar plasma excited at distributed electron cyclotron resonance in one single process. The composite consists of carbon-based nanoparticles embedded in a hydrogenated amorphous ma
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b372eff4f1f666c779deacabc0bafafd
https://doi.org/10.1002/ppap.201000151
https://doi.org/10.1002/ppap.201000151
