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Publikováno v:
Plasma Processes and Polymers. 8:401-408
Composite thin films are deposited from acetylene in a microwave multipolar plasma excited at distributed electron cyclotron resonance in one single process. The composite consists of carbon-based nanoparticles embedded in a hydrogenated amorphous ma
Publikováno v:
Plasma Processes & Polymers; 5/20/2011, Vol. 8 Issue 5, p401-408, 8p