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pro vyhledávání: '"Ardeshir Ardy J. Sidhwa"'
Publikováno v:
2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Meeting defectivity requirements are challenging as technology nodes continue to scale down. Defect variability such as particles and residues create killer defects at the component-level and is expected to severely impact product yields at sub-20 na
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bb191a89b1d15b7bd397004d28790e79
https://doi.org/10.1109/asmc.2016.7491137
https://doi.org/10.1109/asmc.2016.7491137
