Zobrazeno 1 - 10
of 24
pro vyhledávání: '"Arash Hajjam"'
Publikováno v:
Journal of Microelectromechanical Systems. 21:681-687
Temperature compensation of thermally actuated high-frequency single crystalline silicon micromechanical resonant structures via high concentration n-type doping has been demonstrated in this paper. The effect of doping level, structural dimensions,
Autor:
Siavash Pourkamali, Arash Hajjam
Publikováno v:
IEEE Sensors Journal. 12:1958-1964
Polymer coated thermal-piezoresistive micromechanical resonant silicon nanobalances have been utilized for detection and concentration measurement of volatile organic compounds in gas phase. Polyglycolic acid, which is the main polymer ingredient of
Publikováno v:
IEEE Sensors Journal. 11:2883-2890
This work demonstrates mass measurement of individual submicron air-borne particles using resonant micromechanical nano-balances. Thermally actuated high-frequency single crystalline silicon resonators fabricated using a single mask process have been
Autor:
Arash Hajjam, Hamid Behnam
Publikováno v:
Ultrasound. 16:160-164
In this paper, we model the ultrasound signal produced by blood-flow through an artery. Our model assumes a number of moving scatterers (red-blood cells), which are randomly distributed in the vessel. The Doppler effect is then introduced by changing
Publikováno v:
2013 IEEE SENSORS.
This work presents a new approach for measuring sub-nano-Newton forces and sub-picometer displacements using MEMS resonators. Different versions of thermally actuated dual plate micromechanical resonators coupled to electrostatic actuators are utiliz
Publikováno v:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
This work presents integration of a MEMS resonant mass balance within an aerosol impactor capable of sampling airborne micro to nanoscale particles. The resonant mass balance provides real-time high resolution information on particulate mass concentr
Publikováno v:
2012 IEEE Sensors.
This work demonstrates the potential of micromechanical resonators as compact human breath detectors. Such sensors can be mounted on robotic platforms used in search and rescue missions for detection of survivors in disaster areas. Human breath carri
Publikováno v:
2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
Publikováno v:
2012 IEEE International Frequency Control Symposium Proceedings.
This paper reports on the design, fabrication and testing of silicon based monolithic thermally actuated MEMS resonators with electrically insulated input and output ports. Promising results lately achieved for thermally actuated micromechanical reso
Publikováno v:
2012 IEEE International Frequency Control Symposium Proceedings.
This paper presents a new technique for electrostatic tuning of the resonant frequency of in-plane thermal piezoresistive microelectromechanical resonators. The tuning method is based on applying a DC bias voltage between the underlying SOI handle la