Zobrazeno 1 - 1
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pro vyhledávání: '"Arūnas Baronas"'
Publikováno v:
Journal of Non-Crystalline Solids. 354:2160-2163
Using three electrode vacuum system for glow discharge of 5% SiH 4 + 95% Ar gas mixture together with thermal evaporation of phosphorus or boric aced, the n- and p-type a-Si:H layers have been deposited. By co-evaporation of phosphorus or boric aced
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6f1e9031f0f63edda488a18c32a242fc
https://doi.org/10.1016/j.jnoncrysol.2007.10.054
https://doi.org/10.1016/j.jnoncrysol.2007.10.054
