Výsledky vyhledávání - "Apoorva Shenoy"

Optimization of Platinum dioxide properties by plasma oxidation of sputtered PtOx

Autor: N S Sterin, Nivedita Basu, Navakanta Bhat, Apoorva Shenoy, Saketh Ram Mamidala

We have previously used reactively sputtered Platinum oxide thin film as DNA sensing element. In this work, we subject the reactively sputtered Platinum oxide thin films to an additional RIE step for 3, 6 and 9 min and carry out a detailed comparativ

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::75d77572215d8a85c2495b63605eade1
https://publica.fraunhofer.de/handle/publica/260311

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Stress Engineering Using Si3N4 for Stiction Free Release of SOI Beams

Autor: V. Uma, Navakanta Bhat, Apoorva Shenoy, Monisha, M. N. Vijayaraghavan, Suman Gupta

Publikováno v: Physics of Semiconductor Devices ISBN: 9783319030012

We report on the effect of thin silicon nitride (Si3N4) induced tensile stress on the structural release of 200 nm thick SOI beam, in the surface micro-machining process. A thin (20 nm/100 nm) LPCVD grown Si3N4 is shown to significantly enhance the y

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c481b29067cb4e0367b031670fb076e7
https://doi.org/10.1007/978-3-319-03002-9_123

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