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pro vyhledávání: '"Apoorva Shenoy"'
We have previously used reactively sputtered Platinum oxide thin film as DNA sensing element. In this work, we subject the reactively sputtered Platinum oxide thin films to an additional RIE step for 3, 6 and 9 min and carry out a detailed comparativ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::75d77572215d8a85c2495b63605eade1
https://publica.fraunhofer.de/handle/publica/260311
https://publica.fraunhofer.de/handle/publica/260311
Publikováno v:
Physics of Semiconductor Devices ISBN: 9783319030012
We report on the effect of thin silicon nitride (Si3N4) induced tensile stress on the structural release of 200 nm thick SOI beam, in the surface micro-machining process. A thin (20 nm/100 nm) LPCVD grown Si3N4 is shown to significantly enhance the y
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c481b29067cb4e0367b031670fb076e7
https://doi.org/10.1007/978-3-319-03002-9_123
https://doi.org/10.1007/978-3-319-03002-9_123
Autor:
V. K. Jain, Abhishek Verma
The purpose of this workshop is to spread the vast amount of information available on semiconductor physics to every possible field throughout the scientific community. As a result, the latest findings, research and discoveries can be quickly dissemi