Výsledky vyhledávání - "Aomori, Masaru"

Akademický článek

Effects of hydrogen passivation on the electrical conduction in undoped polycrystalline silicon...

Autor: Saito, Yoji, Aomori, Masaru

Publikováno v: Journal of Applied Physics; 1/15/1997, Vol. 81 Issue 2, p754, 4p, 8 Graphs

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Akademický článek

Observation and evaluation of flaked particle behavior in magnetically enhanced reactive ion etching equipment using a dipole ring magnet.

Autor: Moriya, Tsuyoshi, Nagaike, Hiroshi, Denpoh, Kazuki, Morimoto, Tamotsu, Aomori, Masaru, Kawaguchi, Shinichi, Shimada, Manabu, Okuyama, Kikuo

Publikováno v: Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2004, Vol. 22 Issue 4, p1688-1693, 6p

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Akademický článek

The application of in situ monitor of extremely rarefied particle clouds grown thermally above wafers by using laser light scattering method to the development of the mass-production condition of the tungsten thermal chemical vapor deposition.

Autor: Ito, Natsuko, Moriya, Tsuyoshi, Uesugi, Fumihiko, Moriya, Shuji, Aomori, Masaru, Kato, Yoshinori, Tachibana, Mitsuhiro

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 4, p1248-1254, 7p

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