Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Anxiang Zhong"'
Autor:
Bowen Liu, Tian Liang, Wenjie Qi, Anxiang Zhong, Mingwei Chen, Yulan Lu, Jian Chen, Deyong Chen, Junbo Wang
Publikováno v:
Microsystems & Nanoengineering, Vol 8, Iss 1, Pp 1-7 (2022)
Abstract A new electrochemical angular microaccelerometer with integrated sensitive electrodes perpendicular to flow channels was developed in this paper. Based on a liquid inertial mass, an incoming angular acceleration was translated into varied co
Externí odkaz:
https://doaj.org/article/10144b4745934088a2e279e94f43cf5e
Publikováno v:
Micromachines, Vol 13, Iss 3, p 354 (2022)
This paper presented an electrochemical seismic micro sensor based on an integrated structure of four centrosymmetric electrodes. In this integrative structure, cathodes were not only distributed on wafer surfaces but also on the inner walls of the f
Externí odkaz:
https://doaj.org/article/db5b56ea59584fe4afdc0acfad82e7cc
Publikováno v:
Micromachines, Vol 13, Iss 1, p 143 (2022)
Aiming at the development needs of low-frequency and high-sensitivity vector hydrophones, this paper has developed a micro-electro-mechanical system (MEMS) based co-oscillating electrochemical vector hydrophone. We obtained the optimized geometric pa
Externí odkaz:
https://doaj.org/article/211a161c756846079a242dec91b63b2f
Publikováno v:
Micromachines, Vol 13, Iss 2, p 186 (2022)
This paper developed an electrochemical angular micro-accelerometer using a silicon-based three-electrode structure as a sensitive unit. Angular acceleration was translated to ion changes around sensitive microelectrodes, and the adoption of the sili
Externí odkaz:
https://doaj.org/article/d237946437354c319396fe36065df031
Autor:
Tian Liang, Bowen Liu, Wenjie Qi, Mingwei Chen, Anxiang Zhong, Yumo Duan, Jian Chen, Deyong Chen, Junbo Wang
Publikováno v:
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::082f4f816987a3d1364957b11dde9a12
https://doi.org/10.1109/mems51670.2022.9699507
https://doi.org/10.1109/mems51670.2022.9699507
Autor:
Jian Chen, Deyong Chen, Tian Liang, Wenjie Qi, Chao Xu, Mingwei Chen, Bowen Liu, Anxiang Zhong, Yumo Duan, Junbo Wang, Xu She
Publikováno v:
NEMS
This study proposes a micromachined electrochemical angular accelerometer based on interdigital electrodes, with the ability to measure low-frequency angular acceleration. In this paper, the design, fabrication, and characterization of the angular ac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8cf7168c6febf0be55b5dd5df22263b9
https://doi.org/10.1109/nems51815.2021.9451444
https://doi.org/10.1109/nems51815.2021.9451444