Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Anton Haase"'
Publikováno v:
Journal of applied crystallography 49(6), 1-11 (2016). doi:10.1107/S1600576716015776
Journal of Applied Crystallography
Journal of Applied Crystallography
Journal of applied crystallography 49(6), 1 - 11(2016). doi:10.1107/S1600576716015776
Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of thes
Cr/Sc multilayer systems can be used as near-normal incidence mirrors for the water window spectral range. It is shown that a detailed characterization of thes
Publikováno v:
Optics express. 25(13)
We investigate the influence of the Mo-layer thickness on the EUV reflectance of Mo/Si mirrors with a set of unpolished and interface-polished Mo/Si/C multilayer mirrors. The Mo-layer thickness is varied in the range from 1.7 nm to 3.05 nm. We use a
Autor:
Analía Fernández Herrero, Victor Soltwisch, Anton Haase, Mika Pflüger, Frank Scholze, Christian Laubis
Publikováno v:
SPIE Proceedings.
As the industry continues to progress along the ITRS roadmap, not only the device dimensions shrink, but the architectures also increase in 3D complexity. Therefore, new metrology approaches for small structures are required. Small angle X-ray scatte
Autor:
Anton Haase, Michael Krumrey, Analía Fernández Herrero, Mika Pflüger, Frank Scholze, Christian Laubis, Jürgen Probst, Victor Soltwisch
Laterally periodic nanostructures have been investigated with grazing-incidence small-angle X-ray scattering (GISAXS) by using the diffraction patterns to reconstruct the surface shape. To model visible light scattering, rigorous calculations of the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::ca20e894029d1c2691fe8ba4849833dc
http://www.helmholtz-berlin.de/pubbin/oai_publication?VT=1&ID=95555
http://www.helmholtz-berlin.de/pubbin/oai_publication?VT=1&ID=95555
Autor:
Christopher Bronner, Felix Brauße, Marie Gille, Petra Tegeder, Stefan Hecht, Anton Haase, Stephan Stremlau
Publikováno v:
Angewandte Chemie International Edition. 52:4422-4425
Silicon-based field-effect transistors (FETs) are the building blocks of modern digital logic circuitry and therefore part of virtually every electronic device available today. Over the past decades, continuous downscaling of existing designs has met
Autor:
Michael Krumrey, Jan Wernecke, Victor Soltwisch, Sven Burger, Anton Haase, Max Schoengen, Juergen Probst, Frank Scholze
Publikováno v:
Physical Review B
Laterally periodic nanostructures were investigated with grazing incidence small angle X-ray scattering. To support an improved reconstruction of nanostructured surface geometries, we investigated the origin of the contributions to the diffuse scatte
Autor:
Anton Haase, M. Bender, M. Leandersson, Oleg B. Malyshev, Bojan Zajec, A. Krämer, H. Reich-Sprenger, Lars Westerberg, H. Kollmus
Publikováno v:
Vacuum. 85:338-343
This paper describes new experiments on the heavy ion desorption yield measurements with 5 MeV/u Ar8+ and summarizes all results of experiments with 5 MeV/u Ar8+ performed at The Svedberg Laborator ...
Publikováno v:
Optical Systems Design 2015: Optical Fabrication, Testing, and Metrology V
The throughput of extreme ultraviolet (EUV) lithography systems is presently strongly limited by the available radiant power at the wafer level. Besides increasing the power of EUV sources, also the quality of the optical elements plays a key role. W
Publikováno v:
31st European Mask and Lithography Conference
EUV Lithography now reaches the fab floor. The technology ramp up and integration with existing processes will require evolutionary steps in many aspects of the technology. For instance will it be necessary to reduce 3D mask effects like shadowing e.
Image potential states (IPSs) have been observed for various adsorbed carbon structures, such as graphene or carbon nanotubes. Graphene nanoribbons (GNRs) are intriguing nanostructures with a significant band gap which promise applications in nanotec
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cf007a14b9cde33379879aabdef9926a
https://doi.org/10.17169/refubium-20208
https://doi.org/10.17169/refubium-20208