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pro vyhledávání: '"Anto^nio A. Von Zuben"'
Autor:
Luis A. M. Barea, Felipe Vallini, Newton C. Frateschi, Anto^nio A. Von Zuben, Elohim Fonseca dos Reis
Publikováno v:
ECS Transactions. 39:299-305
A study of the damages caused by gallium focused ion beam (FIB) is presented. Potential damages caused by local heating, ion implantation, and selective sputtering are presented. Preliminary analysis shows that local heating is negligible. Gallium im
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::60267785e710af37348565b929602d4b
https://doi.org/10.1149/1.3615206
https://doi.org/10.1149/1.3615206
