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Autor:
György Radnóczi, Frans Munnik, U. Kreissig, Matthias Krause, Anthony Taupeau, Andreas Kolitsch, A. Vanhulsel, Laurent Bedel, Zsolt Czigány, G. Abrasonis
Publikováno v:
Thin Solid Films. 518:77-83
BCxNy thin films deposited at 250 °C by pulsed reactive magnetron sputtering of a B4C target in an Ar/N2 plasma were studied by elastic recoil detection analysis, Fourier transform infrared, Raman, and photoelectron spectroscopy, electron microscopy