Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Anthony Muscat"'
Autor:
Anthony Muscat
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 31:194-194
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5b8aaafd96187ff6e08abbae00fdb6b1
https://doi.org/10.1109/tsm.2018.2820238
https://doi.org/10.1109/tsm.2018.2820238
Autor:
Anthony Muscat
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 29:390-390
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::76bae32be2ef7dc26e0aceefa8863a5d
https://doi.org/10.1109/tsm.2016.2611739
https://doi.org/10.1109/tsm.2016.2611739
Autor:
T. Q. Le, M. Kocsis, Anthony Muscat, Sonja Sioncke, L. Hall, David Hellin, Frank Holsteyns, S. Degendt, Twan Bearda, T. Kotani, M.M. Heyns, Atsuro Eitoku, Stephane Malhouitre, S. Garaud, Jim Snow, Guy Vereecke, Sophia Arnauts, Francesca Barbagini, Paul Mertens, M. Frank, K. Kenis, Martine Claes, C. Demaco, Wim Fyen, M. Lux, V. Parachiev, Harald Kraus, Rita Vos, Els Kesters, Kaidong Xu, Kurt Wostyn, K. Kim, Kenichi Sano, B. Onsia, K-t. Lee, Ronald Hoyer, J. Hoeymissen, Jens Rip
Publikováno v:
2006 International Symposium on VLSI Technology, Systems, and Applications.
This study will review some of the critical aspects of cleaning for sub-65 nm technologies. These issues include: surface preparation for high k dielectrics on Si and on Ge, metal gate cleaning and removal of small particles without creating damage t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac4879180f47b00ac6c9954718f5e23b
https://doi.org/10.1109/vtsa.2006.251095
https://doi.org/10.1109/vtsa.2006.251095
Autor:
Anthony Muscat
OAK-B135 This research work focused on control of the reactive species inside a plasma through measurement and manipulation of the electron energy distribution function (EEDF) and on understanding the surface reaction mechanisms on the substrate expo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8531ae1969ce708e5d26827040120a15
https://doi.org/10.2172/820945
https://doi.org/10.2172/820945
Autor:
Rachel Morrish, Anthony Muscat
Publikováno v:
ECS Meeting Abstracts. :1314-1314
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5fb77147f8a168be90f01efbbf6225a5
https://doi.org/10.1149/ma2007-01/36/1314
https://doi.org/10.1149/ma2007-01/36/1314
Publikováno v:
ECS Meeting Abstracts. :790-790
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::887a79ce8cf58b925a678d4261c6f399
https://doi.org/10.1149/ma2005-02/20/790
https://doi.org/10.1149/ma2005-02/20/790
Autor:
Bo Xie, Anthony Muscat
Publikováno v:
ECS Meeting Abstracts. :789-789
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::efa1875eb7f3f1443c7237e9e9e4b502
https://doi.org/10.1149/ma2005-02/20/789
https://doi.org/10.1149/ma2005-02/20/789