Zobrazeno 1 - 10
of 30
pro vyhledávání: '"Anthony G. Fowler"'
Publikováno v:
IEEE Transactions on Control Systems Technology. 27:2271-2278
Microcantilevers featuring separate built-in actuation and displacement sensing capabilities allow effective and simple implementation of control methods, opening a pathway to achieving higher scan speeds in tapping-mode atomic force microscopy. Such
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::81510aac2c084ffe76d894e8a2bcc427
https://doi.org/10.1109/tcst.2018.2850338
https://doi.org/10.1109/tcst.2018.2850338
Publikováno v:
Journal of Microelectromechanical Systems. 26:1287-1297
Active microcantilevers with on-chip sensing and actuation capabilities provide significant advantages in tapping-mode atomic force microscopy. The collocated transduction in active cantilevers enables effective control of their dynamics, allowing fo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::274ef5da033130e3c957d12e264d7e6a
https://doi.org/10.1109/jmems.2017.2731762
https://doi.org/10.1109/jmems.2017.2731762
Publikováno v:
Journal of Microelectromechanical Systems. 26:469-500
Nanopositioners are high-precision mechatronic devices that are capable of generating mechanical motion with nanometer or sub-nanometer resolution. With this motion typically being available over mechanical bandwidths of several kilohertz or greater,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::33f0fd1dc7f0b2e48296e95f09defeab
https://doi.org/10.1109/jmems.2017.2687861
https://doi.org/10.1109/jmems.2017.2687861
Publikováno v:
IEEE Sensors Journal. 16:7774-7783
This paper presents a microelectromechanical systems (MEMS)-based energy harvester that is designed to harvest electrical energy from an external source of ultrasonic waves. The harvester features a novel 4-degree-of-freedom (DOF) mechanical design t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2b21e347fc086a30f5aa4730c67917ef
https://doi.org/10.1109/jsen.2016.2601168
https://doi.org/10.1109/jsen.2016.2601168
Publikováno v:
IEEE Transactions on Control Systems Technology. 24:1717-1728
We demonstrate the application of internal model control for accurate tracking of spiral scan trajectories, where the reference signals are orthogonal sinusoids whose amplitudes linearly vary with time. The plant is a 2-D microelectromechanical syste
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::32a3514e4b82197c9e1331691f475b61
https://doi.org/10.1109/tcst.2015.2508979
https://doi.org/10.1109/tcst.2015.2508979
Publikováno v:
Journal of Microelectromechanical Systems. 24:1730-1740
The design and characterization of a two-degree-of-freedom serial kinematic microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM) is reported. A novel design is introduced to achieve a serial kinematic mechani
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6b0aa9d343928470fe6b1c9186442bd5
https://doi.org/10.1109/jmems.2015.2434390
https://doi.org/10.1109/jmems.2015.2434390
Publikováno v:
Journal of Microelectromechanical Systems. 24:1164-1172
This paper presents a force-controlled microelectromechanical systems rotary microgripper with integrated electrothermal sensors. The proposed microgripper achieves a large displacement ( $85~\mu $ m) at low driving voltages (≤80 V). Closed-loop fo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d0220b6ebd44bbc9718901fad69f0625
https://doi.org/10.1109/jmems.2015.2388539
https://doi.org/10.1109/jmems.2015.2388539
Publikováno v:
Journal of Microelectromechanical Systems. 23:1454-1462
This paper presents the design and characterization of a microelectromechanical systems (MEMS)-based energy harvester with target applications, including implanted biomedical sensors and actuators. The harvester is designed to utilize ultrasonic wave
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7aec762c64d6c23962a617b4a0135955
https://doi.org/10.1109/jmems.2014.2315199
https://doi.org/10.1109/jmems.2014.2315199
Publikováno v:
CCTA
One of the major prerequisites to obtaining highspeed tapping-mode atomic force microscopy (AFM) is a controllable quality (Q) factor. This can be achieved through the use of self-sensing cantilevers that utilize piezoelectric actuation. However, suc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea214f730665bf4fd328e6d0449a344d
https://doi.org/10.1109/ccta.2017.8062451
https://doi.org/10.1109/ccta.2017.8062451
Publikováno v:
ACC
This paper presents a novel microelectromechanical systems (MEMS) implementation of an on-chip atomic force microscope (AFM), fabricated using a silicon-on-insulator process. The device features an XY scanner with electrostatic actuators and electrot
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55bb63d11e0c30eea09a2384eb2531e8
https://doi.org/10.23919/acc.2017.7963386
https://doi.org/10.23919/acc.2017.7963386