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pro vyhledávání: '"Anthony Delmonico"'
Autor:
Jingyuan Deng, Sean Bailey, Ruiwen Ai, Anthony Delmonico, Gregory Denbeaux, Shaoyi Jiang, Christopher K. Ober
Publikováno v:
ACS Macro Letters. 11:1049-1054
Conventional chemically amplified resists (CARs) rely on the usage of photoacid generators to serve as the source of chemical amplification. However, acid diffusion inevitably accompanies CARs and has led to the resolution, line edge roughness, and s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::45a570224c54b681637413febd4df05d
https://doi.org/10.1021/acsmacrolett.2c00395
https://doi.org/10.1021/acsmacrolett.2c00395
