Theory and molecular simulations of plasma sputtering, transport and deposition processes

Autor: Pascal Brault, Anne-Lise Thomann, Marjorie Cavarroc

Publikováno v: The European Physical Journal D. 77

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e674e4af725eb4d3bb308b30e9960cf5
https://doi.org/10.1140/epjd/s10053-023-00592-x

Picosecond laser beam nanostructuring of GDC thin films: exchange surface enhancement by LIPSS

Autor: Wael Karim, Agnès Petit, Hervé Rabat, Malek Tabbal, Anne-Lise Thomann, Nadjib Semmar

Publikováno v: Applied Physics A. 128

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a7e702bcf32a680c23812f0630bd9463
https://doi.org/10.1007/s00339-022-05866-6

Influence of helium incorporation on growth process and properties of aluminum thin films deposited by DC magnetron sputtering

Autor: Sara Ibrahim, Agnès Petit, Pascal Brault, Fatima Zahrae Lahboub, Amaël Caillard, Asunción Fernández, Anne-Lise Thomann, Thierry Sauvage, Eric Millon

Publikováno v: Surface and Coatings Technology
Surface and Coatings Technology, Elsevier, 2021, 426, pp.127808. ⟨10.1016/j.surfcoat.2021.127808⟩

International audience; The effect of helium content on the morphology, crystallinity, and composition of aluminum films was investigated by depositing He-loaded Al films onto Si substrates via direct current (DC) magnetron sputtering in different Ar

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c638c2caf47e662211e15c7a1d430455
https://hal.archives-ouvertes.fr/hal-03384877

Optimized magnetron sputtering process for the deposition of gadolinia doped ceria layers with controlled structural properties

Autor: Thierry Sauvage, Amaël Caillard, Pierre Coddet, Martin Mickan, Julien Vulliet, Anne-Lise Thomann

Publikováno v: Surface and Coatings Technology
Surface and Coatings Technology, 2020, 398, pp.126095. ⟨10.1016/j.surfcoat.2020.126095⟩
Surface and Coatings Technology, Elsevier, 2020, 398, pp.126095. ⟨10.1016/j.surfcoat.2020.126095⟩

International audience; Gadolinia doped ceria (GDC) films have been deposited using reactive magnetron sputtering and the influence of the deposition parameters on the properties of the films has been investigated. The oxygen flow rate, the target-su

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::414ce44bb26c9426b0c15998e33a29cc
https://hal.science/hal-03034320

On the relationship between the plasma characteristics, the microstructure and the optical properties of reactively sputtered TiO2 thin films

Autor: Stephanos Konstantinidis, Axel Hemberg, Julien L. Colaux, Priya Laha, M. Michiels, Thomas Godfroid, Adriano Panepinto, Rony Snyders, Anne-Lise Thomann, Amaël Caillard, Stéphane Lucas, Michel Voué, Herman Terryn, Pavel Moskovkin, Olivier Douhéret

Publikováno v: Journal of Physics D: Applied Physics. 54:415202

A titanium target was reactively sputtered in an Ar/O2 atmosphere by (i) conventional direct current magnetron sputtering (DCMS), (ii) high-power impulse magnetron sputtering (HiPIMS), and (iii) bipolar HiPIMS (BPH) discharges for the deposition of t

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::22ee09a132b48c266a74681df1562b6f
https://doi.org/10.1088/1361-6463/ac118e