Zobrazeno 1 - 10
of 29
pro vyhledávání: '"Anna Vasilieva"'
Autor:
Anna Vasilieva, A. T. Rakhimov, Tatyana Rakhimova, Olga Proshina, A.S. Kovalev, D. G. Voloshin
Publikováno v:
Physics of Plasmas. 28:093507
The experimental and theoretical study of radiofrequency capacitively coupled plasma discharge afterglow has been carried out. Temporal dynamics of Ar metastable and resonance states densities are measured by the absorption method with separate capac
Publikováno v:
Plasma Physics Reports. 41:426-433
The behavior of the populations of two metastable and two lower resonance levels of argon atoms in the plasma of an RF capacitive discharge was studied. The populations were measured by two methods: the method of emission self-absorption and the meth
Autor:
Tatyana Rakhimova, A I Zotovich, S M Zyryanov, Olga Proshina, A. T. Rakhimov, Anna Vasilieva, A.S. Kovalev
Publikováno v:
Plasma Sources Science and Technology. 29:015015
Autor:
Olga Proshina, Tatyana Rakhimova, A.S. Kovalev, K. A. Kurchikov, Anna Vasilieva, D. G. Voloshin
Publikováno v:
Physics of Plasmas. 26:123501
An experimental measurement of the density of excited argon states 1s5, 1s4, 1s3, and 1s2 was carried out for an rf capacitive discharge in argon at a frequency of 13.56 MHz and 81 MHz for two pressures of 50 and 100 mTorr in a wide range of discharg
Autor:
A. T. Rakhimov, S M Zyryanov, Yu. A. Mankelevich, O.V. Braginsky, A.S. Kovalev, Mikhail R. Baklanov, Tatyana Rakhimova, E. M. Malykhin, Dmitry Lopaev, Anna Vasilieva
Publikováno v:
IEEE Transactions on Plasma Science. 37:1697-1704
The interaction of O and H atoms with SiOCH nanoporous low-dielectric-constant (low-k) films is studied in the far plasma afterglow in the absence of ion and photon fluxes on the surface. The loss probabilities of O and H atoms are directly measured
Autor:
Olga Proshina, A.S. Kovalev, A. T. Rakhimov, D. V. Lopaev, Tatyana Rakhimova, O.V. Braginsky, Anna Vasilieva, D. Shamiryan, D. G. Voloshin, K.S. Klopovskiy
Publikováno v:
IEEE Transactions on Plasma Science. 37:1683-1696
In this paper, the experimental and theoretical studies of RF capacitive-coupled-plasma (CCP) discharge at frequency of 81 MHz in Ar/CF4 and Ar/CHF3 mixtures were carried out. The density distributions of CF2, F, and H radicals in the interelectrode
Autor:
Olga Proshina, A. T. Rakhimov, A.S. Kovalev, Dmitry Lopaev, O.V. Braginsky, Anna Vasilieva, Tatyana Rakhimova
Publikováno v:
Journal of Physics D: Applied Physics. 40:6571-6582
This work is devoted to the study of the possibility of obtaining the highest O2(a 1 � g) yield in ED SOG at the high absolute O2(a 1 � g) concentration needed for developing a powerful oxygen–iodine laser pumped by electric discharge. A single
Autor:
D. G. Voloshin, M. A. Olevanov, Olga Proshina, Tatyana Rakhimova, Dmitry Lopaev, Anna Vasilieva, O.V. Braginsky, A. T. Rakhimov, A.S. Kovalev, V. V. Ivanov, Yu. A. Mankelevich
Publikováno v:
IEEE Transactions on Plasma Science. 35:1229-1240
Ion energy distribution functions (IEDFs) at the electrodes in single frequency (SF) and dual frequency (DF) radio-frequency discharges in Ar at pressures of 20 and 45 mtorr are measured and calculated. A numerical simulation of the IEDF on the base
Autor:
Yu. A. Mankelevich, A.S. Kovalev, Olga Proshina, Dmitry Lopaev, Tatyana Rakhimova, O.V. Braginsky, Anna Vasilieva, A. T. Rakhimov
Publikováno v:
Journal of Physics D: Applied Physics. 39:5191-5200
A 2D self-consistent simulation of an rf discharge in a gas flow in pure oxygen over a wide range of discharge parameters was carried out. The simulation was made at the experimental conditions of Part I of this paper for the discharge tube with an H
Autor:
O.V. Braginsky, Anna Vasilieva, A.S. Kovalev, Dmitry Lopaev, Olga Proshina, Yu. A. Mankelevich, A. T. Rakhimov, Tatyana Rakhimova
Publikováno v:
Journal of Physics D: Applied Physics. 39:5183-5190
The scaling on pressure for a discharge singlet oxygen generator based on the rf discharge excitation of O2 flow is studied in the context of the problem of oxygen?iodine laser pumping. With this aim, the evolution of O2(a?1??g) and molecules as well