Zobrazeno 1 - 10
of 20
pro vyhledávání: '"Anna Malmros"'
Autor:
Ding-Yuan Chen, Mattias Thorsell, Anna Malmros, Jr-Tai Chen, Niklas Rorsman, Hans Hjelmgren, Olof Kordina
Publikováno v:
IEEE Electron Device Letters. 41:828-831
High performance microwave GaN-on-SiC HEMTs are demonstrated on a heterostructure without a conventional thick doped buffer. The HEMT is fabricated on a high-quality $0.25~\boldsymbol {\mu }\text{m}$ unintentional doped GaN layer grown directly on a
Autor:
Jr-Tai Chen, Herbert Zirath, Lars Hultman, Anna Malmros, Jun Lu, Einar Ö. Sveinbjörnsson, Hans Hjelmgren, Olof Kordina, Niklas Rorsman
Publikováno v:
IEEE Transactions on Electron Devices. 66:2910-2915
An enhancement of the electron mobility ( $\mu $ ) in InAlN/AlN/GaN heterostructures is demonstrated by the incorporation of a thin GaN interlayer (IL) between the InAlN and AlN. The introduction of a GaN IL increases $\mu $ at room temperature (RT)
Autor:
Mattias Thorsell, Herbert Zirath, Cedric Lacam, Anna Malmros, Hans Hjelmgren, Piero Gamarra, Niklas Rorsman, Sylvain Delage
Publikováno v:
IEEE Transactions on Electron Devices. 66:364-371
The impact of varying the GaN channel layer thickness ( ${t}_{\text {ch}}$ ) in InAlGaN/AlN/GaN HEMTs with C-doped AlGaN back barriers is investigated. ${t}_{\text {ch}}$ was 50, 100, and 150 nm, and the gate length of the fabricated HEMTs ranged fro
Autor:
Mattias Thorsell, Sebastian Gustafsson, Anna Malmros, Niklas Rorsman, Erik Janzén, Jr-Tai Chen, Johan Bergsten, Urban Forsberg
Publikováno v:
IEEE Transactions on Electron Devices. 63:333-338
The impact of the sharpness of the AlGaN/GaN interface in high-electron mobility transistors (HEMTs) is investigated. Two structures, one with an optimized AlGaN/GaN interface and another with an unoptimized, were grown using hot-wall metal-organic c
Autor:
Marie-Antoinette di Forte-Poisson, Cedric Lacam, Piero Gamarra, Mattias Thorsell, M. Tordjman, Anna Malmros, Herbert Zirath, Niklas Rorsman, Raphaël Aubry
Publikováno v:
physica status solidi c. 11:924-927
An InAlN/AlN/GaN HEMT with Au-free Ta-based ohmic contacts and a high-quality PECVD SiN passivation is reported. The ohmic contacts were annealed at 550 degrees C, resulting in a contact resistance of 0.64 Omm. The gate length was 50 nm. The device p
Autor:
Olle Axelsson, Anna Malmros, Niklas Rorsman, Johan Bergsten, Mattias Thorsell, Sebastian Gustafsson, Tongde Huang
Publikováno v:
IEEE Electron Device Letters. 36:537-539
A bilayer SiN x passivation scheme has been developed using low pressure chemical vapor deposition (LPCVD), which effectively suppresses the dispersive effects in AlGaN/GaN high-electron-mobility transistors (HEMTs) for microwave power operation. The
Autor:
Niklas Rorsman, Marie-Antoinette di Forte-Poisson, Raphaël Aubry, Cedric Lacam, M. Tordjman, Anna Malmros, Thanh Ngoc Thi Do, Piero Gamarra, Mikael Horberg, Dan Kuylenstierna
Publikováno v:
IEEE Electron Device Letters. 36:315-317
This letter reports on effects of Si3N4 and Al2O3 surface passivation as well as different deposition methods on the low-frequency noise (LFN) characteristics for AlInN/AlN/GaN high electron mobility transistors (HEMTs). Two samples are passivated wi
Autor:
Hans Hjelmgren, Raphaël Aubry, Marie-Antoinette di Forte-Poisson, Anna Malmros, M. Tordjman, Piero Gamarra, Mattias Thorsell, Cedric Lacam, Niklas Rorsman
Publikováno v:
IEEE Electron Device Letters. 36:235-237
Al2O3 films deposited by thermal and plasma-assisted atomic layer deposition (ALD) were evaluated as passivation layers for InAlN/AlN/GaN HEMTs. As a reference, a comparison was made with the more conventional plasma enhanced chemical vapor depositio
Publikováno v:
Thin Solid Films. 520:2162-2165
The opposite signs of the temperature coefficient of resistance (TCR) of two thin film materials, titanium nitride (TiN) and tantalum nitride (TaN), were used to form temperature compensated thin film resistors (TFRs). The principle of designing temp
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 28:912-915
Titanium nitride (TiN) thin film resistors (TFRs) have been fabricated by reactive sputter deposition. The TFRs were characterized in terms of composition, thickness, and resistance. Furthermore, a first assessment of the resistor reliability was mad