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pro vyhledávání: '"Anna K. Rüsseler"'
Autor:
Anna K. Rüsseler, Philipp Gehrke, Gerd A. Hoffmann, Guido Schönsee, Axel Thiel, Martina Vitt, Andreas Wienke, Detlev Ristau
Publikováno v:
Optical Interference Coatings Conference (OIC) 2022.
To unlock the benefits of thin-film filters, produced by means of ion beam sputtering, for compact, hybrid integrated optical systems, we have implemented a sacrificial-substrate approach to create high-precision, miniaturized, substrate-free filters
Autor:
Anna K. Rüsseler, Philipp Gehrke, Florian Carstens, Gerd-A. Hoffmann, Guido Schönsee, Axel Thiel, Martina Vitt, Andreas Wienke, Detlev Ristau
Publikováno v:
Applied Optics. 62:B188
We have created high-precision, miniaturized, substrate-free filters, based on ion beam sputtering on a sacrificial substrate. The sacrificial layer is cost efficient and environmentally friendly and can be dissolved using only water. We demonstrate