Zobrazeno 1 - 10
of 79
pro vyhledávání: '"Anna Gorecka Drzazga"'
Publikováno v:
2021 34th International Vacuum Nanoelectronics Conference (IVNC).
The paper presents the concept of a miniature X-ray source fabricated entirely in the MEMS technology. Our construction integrates all the components, including high vacuum micropump, on a single silicon-glass chip. The source generates a conical X-r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8051cb59c60f8cffeb0e8ff58f5dcbff
https://doi.org/10.1109/ivnc52431.2021.9600697
https://doi.org/10.1109/ivnc52431.2021.9600697
Publikováno v:
Ultramicroscopy. 225
This article describes a miniature electron beam scanning system based on an octupole electrode as the key stage of the implementation of the MEMS electron microscope. The scanning system consists of a silicon electrode with a central hole, containin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::941816b2d197f2572097dc075aad4ecf
https://pubmed.ncbi.nlm.nih.gov/33895638
https://pubmed.ncbi.nlm.nih.gov/33895638
Publikováno v:
Vacuum. 151:167-174
This paper describes a new type of a miniature ion source (about 0.05 cm3), partially based on the construction of a magnetron but made with the use of the MEMS (Micro-Electro-Mechanical System) technology. Two configurations of the device have been
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::43f91d44777180e16bddaf7040c6e067
https://doi.org/10.1016/j.vacuum.2018.01.048
https://doi.org/10.1016/j.vacuum.2018.01.048
Autor:
Anna Gorecka-Drzazga
Publikováno v:
Journal of Microelectromechanical Systems. 26:295-302
This paper presents an overview of the design and technology of miniature X-ray sources of various types, which can be useful in the portable instruments for diagnosis and precision medical therapy, as well as in industrial applications. Several exam
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::208fe1e825310b472d35fb1ffda1d25d
https://doi.org/10.1109/jmems.2016.2640344
https://doi.org/10.1109/jmems.2016.2640344
Autor:
Anna Gorecka-Drzazga, Piotr Szyszka, Tomasz Grzebyk, Jan Dziuban, Ch. Lee, Dihan Hasan, M. Bialas
Publikováno v:
2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS).
This paper presents the concept of a MEMS mass spectrometer, which integrates all necessary modules on a single vacuum-sealed chip: a high vacuum micropump, a sample injection system, an ion source, an analyzer and a detector. Our MEMS mass spectrome
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::52b4def356b3aa10b64ff402993b3e5f
https://doi.org/10.1109/powermems49317.2019.92321112609
https://doi.org/10.1109/powermems49317.2019.92321112609
Publikováno v:
2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS).
This work describes the construction, working principle and properties of two types of ion sources made in MEMS technology, designed for spectroscopic identification of gaseous and liquid samples. The first one is formed as an electro-magnetic trap e
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6c3a85fc87ec5bcd4b0beeac6dc4949e
https://doi.org/10.1109/powermems49317.2019.92321108346
https://doi.org/10.1109/powermems49317.2019.92321108346
Autor:
Anna Gorecka-Drzazga, Tomasz Grzebyk
Publikováno v:
Sensors and Actuators A: Physical. 246:148-155
The paper presents the first MEMS type ionization vacuum sensor corresponding to the classical gauges with cold cathodes. In contrast to the other MEMS sensors, it works both in medium and high vacuum. It covers a pressure range from 20 down to 10−
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3abe6f90ac123f494f908178d224b43b
https://doi.org/10.1016/j.sna.2016.05.021
https://doi.org/10.1016/j.sna.2016.05.021
Publikováno v:
IEEE Transactions on Electron Devices. 63:809-813
This paper describes a microelectromechanical-system-type field emission electron source fabricated as a planar silicon structure bonded with a glass substrate. It consists of a carbon nanotube cathode, beam formation electrodes, and silicon glass va
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6c9380592a5d73b2ae455ad6fcb8382e
https://doi.org/10.1109/ted.2015.2506778
https://doi.org/10.1109/ted.2015.2506778
Publikováno v:
Vacuum. 178:109452
This paper presents a pressure control system designed for MEMS (Micro-Electro-Mechanical System) devices working in vacuum conditions, especially for a currently developed miniature mass spectrometer. It is based on an idea to set the vacuum level i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bf5a66085bb62339b3d107fdf61bb3ea
https://doi.org/10.1016/j.vacuum.2020.109452
https://doi.org/10.1016/j.vacuum.2020.109452
Publikováno v:
2018 31st International Vacuum Nanoelectronics Conference (IVNC).
This paper describes a miniature, silicon-glass, electron-impact ion source, in which a field emission carbon nanotube cathode is separated from the external atmosphere by a semitransparent Si3N4 membrane. High vacuum necessary for the proper operati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::36da1c600d84a72a7df2743ea1950e37
https://doi.org/10.1109/ivnc.2018.8520270
https://doi.org/10.1109/ivnc.2018.8520270