Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Anja K. van Langen-Suurling"'
Autor:
Anja K. van Langen-Suurling, Viola Tokárová, Charles de Boer, Falco C. M. J. M. van Delft, Ondřej Kašpar, Frank W. A. Dirne, Dan V. Nicolau, Ayyappasamy Sudalaiyadum Perumal
Publikováno v:
New Journal of Physics, 23(8)
New Journal of Physics
New Journal of Physics
Non-deterministic polynomial (NP-) complete problems, whose number of possible solutions grows exponentially with the number of variables, require by necessity massively parallel computation. Because sequential computers, such as solid state-based on
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a2d7a387c1d1ef649893a9c2e374e239
https://doi.org/10.1088/1367-2630/ac1d38
https://doi.org/10.1088/1367-2630/ac1d38
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 18:3419
A bilayer resist system, consisting of hydrogen silsesquioxane (HSQ) as negative tone electron (e)-beam resist top coat and hard baked novolak resist as bottom coat, has been investigated for its ability to yield high aspect ratio nanoscale structure
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::558f6bbeb8cfb0285c2b1120f33ab5d1
https://doi.org/10.1116/1.1319682
https://doi.org/10.1116/1.1319682