Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Anil Gunay-Demirkol"'
Autor:
David Hellin, Fung Suong Ou, T. Hopf, Efraín Altamirano-Sánchez, Daniel Sobieski, Vassilios Constantoudis, William Clark, Gian Lorusso, Zheng Tao, Anil Gunay-Demirkol, Jean-Luc Everaert
Publikováno v:
SPIE Newsroom.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8ff2c8c5f35530d117f57050f66d3a59
https://doi.org/10.1117/2.1201604.006378
https://doi.org/10.1117/2.1201604.006378
Autor:
Anil Gunay-Demirkol, Ronen Urenski, Igor Turovets, Anne-Laure Charley, Stephane Godny, Efrain Altamirano Sanchez, Philippe Leray, Oded Cohen, Shay Wolfling, Stephane Heraud
Publikováno v:
SPIE Proceedings.
In this work, capabilities of scatterometry at various steps of the self-aligned quadruple patterning (SAQP) process flow for 7nm (N7) technology node are demonstrated including the pitch walk measurement on the final fin etch step. The scatterometry
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::de308f72a635f4cc768bc48e5bd55bc0
https://doi.org/10.1117/12.2220287
https://doi.org/10.1117/12.2220287
Publikováno v:
Stephane Heraud, Nova Measuring Instruments GmbH (Germany)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=r3c4b2081b22::20fd994099d92f631712746af4822eaf