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Autor:
Ilker Ender Ocak, Jaibir Sharma, Dim-Lee Kwong, Daw Don Cheam, Bangtao Chen, Navab Singh, Alex Yuandong Gu, Geng L. Chua, Pushpapraj Singh, Angel T.H. Lin, Sanchitha Nirodha Fernando
Publikováno v:
2014 IEEE International Electron Devices Meeting.
A monolithic 9 degree of freedom capacitive inertial MEMS platform is presented in this paper. This platform for the first time integrates 3 axis gyroscopes, accelerometers, and Lorentz Force magnetometers together on the same chip without using any
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2af0c060a8b93cbd9219957bed9cd3b2
https://doi.org/10.1109/iedm.2014.7047103
https://doi.org/10.1109/iedm.2014.7047103
