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Akademický článek

A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

Autor: Angel Savov, Shivani Joshi, Salman Shafqat, Johan Hoefnagels, Marcus Louwerse, Ronald Stoute, Ronald Dekker

Publikováno v: Micromachines, Vol 9, Iss 1, p 39 (2018)

A device for studying the mechanical and electrical behavior of free-standing micro-fabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in

Externí odkaz: https://doaj.org/article/fe39c0ecb0b84578a8dbee21dfe0186d

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Akademický článek

Ultra-Stretchable Interconnects for High-Density Stretchable Electronics

Autor: Salman Shafqat, Johan P. M. Hoefnagels, Angel Savov, Shivani Joshi, Ronald Dekker, Marc G. D. Geers

Publikováno v: Micromachines, Vol 8, Iss 9, p 277 (2017)

The exciting field of stretchable electronics (SE) promises numerous novel applications, particularly in-body and medical diagnostics devices. However, future advanced SE miniature devices will require high-density, extremely stretchable interconnect

Externí odkaz: https://doaj.org/article/0298817507e04bfab8c3e4ac274f7e81

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Adhesion Improvement of Polyimide/PDMS Interface by Polyimide Surface Modification

Autor: Shivani Joshi, Angel Savov, Ronald Dekker, Antonie van Loon

Publikováno v: MRS Advances. 1:33-38

Silicon wafers coated with a 5μm thick layer of polyimide were treated with different surface modification techniques such as chemical adhesion promoters, oxygen plasma and an Ar+ sputter etch. After surface modification, the wafers were molded with

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::02ed69e4e6217cc79ecf1e6ff6606a99
https://doi.org/10.1557/adv.2016.56

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Substrate Transfer Technology for Stretchable Electronics

Autor: Angel Savov, Ronald Dekker, Shivani Joshi

Publikováno v: Procedia Engineering, 168

This paper focuses on the implementation of a new technique for the fabrication of stretchable electronic patches that can be used for medical applications. The technique is based on the Electronics on Plastics by Laser Release (EPlaR) technology whi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::15e532d6697d0db678d83bc869f28433

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Multi-axial electro-mechanical testing methodology for highly stretchable freestanding micron-sized structures

Autor: Marc G.D. Geers, Angel Savov, Johan P.M. Hoefnagels, Salman Shafqat, Shivani Joshi, Ronald Dekker

Publikováno v: Journal of Micromechanics and Microengineering, 30(5):055002. Institute of Physics

Recent advances in MEMS technology have brought forward a new class of high-density stretchable/flexible electronics as well as large displacement MEMS devices. The in-situ electro-mechanical characterization of such devices is challenging since it r

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::9608bb047c48d97464f5f68f4857cd52
https://doi.org/10.1088/1361-6439/ab748f

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Investigation of 'fur-like' residues post dry etching of polyimide using aluminum hard etch mask

Autor: Ronald Dekker, Angel Savov, Salman Shafqat, Shivani Joshi

Publikováno v: Materials Science in Semiconductor Processing, 75, 130-135. Elsevier
Materials Science in Semiconductor Processing, 75

The authors found that oxygen plasma etching of polyimide (PI) with aluminum (Al) as a hard-etch mask results in lightly textured arbitrary shaped “fur-like” residues. Upon investigation, the presence of Al was detected in these residues. Ruling

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::282247b394f93f36d2dff0d80a94d140
https://research.tue.nl/nl/publications/b86a7df0-4250-4639-9eab-e52b14df9ea0

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A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

Autor: Marcus Louwerse, Angel Savov, Shivani Joshi, Ronald Stoute, Salman Shafqat, Johan P.M. Hoefnagels, Ronald Dekker

Publikováno v: Micromachines, 9(1)
Micromachines, 9(1):39. Multidisciplinary Digital Publishing Institute (MDPI)
Micromachines, Vol 9, Iss 1, p 39 (2018)
Micromachines
Micromachines; Volume 9; Issue 1; Pages: 39

A device for studying the mechanical and electrical behavior of free-standing microfabricated metal structures, subjected to a very large deformation, is presented in this paper. The free-standing structures are intended to serve as interconnects in

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::37c7029b133471238d844dabe6ad4a40
http://resolver.tudelft.nl/uuid:1b75e581-cfb7-4cd9-938d-a316617bb49b

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Wafer-Scale Integration for Semi-Flexible Neural Implant Miniaturization

Autor: Marta Kluba, Ronald Dekker, Bruno Morana, Angel Savov, Gregory Pandraud, H.W. van Zeijl

Publikováno v: Proceedings, 2(13)
Proceedings, Vol 2, Iss 13, p 941 (2018)

We present a novel, wafer-based fabrication process that enables integration and assembly of electronic components, such as ASICs and decoupling capacitors, with flexible interconnects. The electronic components are fabricated in, or placed on precis

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c5eb3c52f07a797b66e51b2b97724b1b
http://resolver.tudelft.nl/uuid:379f5983-5fdf-423a-8e21-c73ac123999e

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Ultra-Stretchable Interconnects for High-Density Stretchable Electronics

Autor: Ronald Dekker, Angel Savov, Marc G.D. Geers, Shivani Joshi, Salman Shafqat, Johan P.M. Hoefnagels

Publikováno v: Micromachines
Micromachines; Volume 8; Issue 9; Pages: 277
Micromachines, 8(9)
Micromachines, Vol 8, Iss 9, p 277 (2017)
Micromachines, 8(9):277. Multidisciplinary Digital Publishing Institute (MDPI)

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d062fe661208977f5d461538caa9ecf8

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A novel processing concept for reduction of substrate artifacts in ultrasound transducer arrays

Autor: Adnan Haider Noor, Ronald Dekker, Angel Savov

Publikováno v: 2015 10th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT).

Free-standing tungsten membranes supported by polyimide pillars were fabricated, demonstrating the general feasibility of the process. To reduce the warping due to the stress in the deposited tungsten layer four different membrane shapes were tested.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::de0810babe11d3ccb2e5476c3ce01365
https://doi.org/10.1109/impact.2015.7365191

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