Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Anestis Gantis"'
Publikováno v:
Microelectronics Reliability. 54:2159-2163
The present paper aims to provide a better insight to the electrical characteristics of silicon nitride films that have been deposited with PECVD method under different conditions. The effect of film thickness, substrate temperature and the frequency
MIM capacitors are considered equally important devices for the assessment of dielectric charging in RF MEMS capacitive switches. Beside the obvious similarities between the down state condition of RF MEMS and MIM capacitors there are also some impor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c499c3000f09e399f1d6c6a2174efe3c
https://zenodo.org/record/55395
https://zenodo.org/record/55395
Publikováno v:
2014 29th International Conference on Microelectronics Proceedings - MIEL 2014.
Autor:
A. Ziaei, George J. Papaioannou, Anestis Gantis, Loukas Michalas, Matroni Koutsoureli, S. Bansropun
Publikováno v:
2014 IEEE 14th Topical Meeting on Silicon Monolithic Integrated Circuits in Rf Systems.
The paper investigates the dielectric charging in nanostructured materials already used or potential candidate for insulating films in MEMS capacitive switches. The investigation takes into account the percolation transport through grain boundaries i
Autor:
Irene Margiolaki, E. Liarokapis, Kazimierz Conder, Eirini Siranidi, Anestis Gantis, M. Calamiotou, Dimitrios Lampakis
Publikováno v:
Acta Crystallographica Section A Foundations of Crystallography. 65:s55-s56