Zobrazeno 1 - 10
of 612
pro vyhledávání: '"Andrle, P."'
Publikováno v:
Adv. Theory Simul. 5, 2200112 (2022)
Parameter reconstructions are indispensable in metrology. Here, the objective is to to explain $K$ experimental measurements by fitting to them a parameterized model of the measurement process. The model parameters are regularly determined by least-s
Externí odkaz:
http://arxiv.org/abs/2202.11559
Autor:
Andrle, Anna, Hönicke, Philipp, Schneider, Philipp, Kayser, Yves, Hammerschmidt, Martin, Burger, Sven, Scholze, Frank, Beckhoff, Burkhard, Soltwisch, Victor
Publikováno v:
Proc. SPIE 11057, 110570M (2019)
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which is taking
Externí odkaz:
http://arxiv.org/abs/2104.13749
Autor:
Saadeh, Qais, Naujok, Philipp, Philipsen, Vicky, Hönicke, Philipp, Laubis, Christian, Buchholz, Christian, Andrle, Anna, Stadelhoff, Christian, Mentzel, Heiko, Schönstedt, Anja, Soltwisch, Victor, Scholze, Frank
The optical constants of ruthenium in the spectral range 8 nm to 23.75 nm with their corresponding uncertainties are derived from the reflectance of a sputtered ruthenium thin film in the Extreme Ultraviolet (EUV) spectral range measured using monoch
Externí odkaz:
http://arxiv.org/abs/2103.11868
Autor:
Andrle, Anna, Hönicke, Philipp, Gwalt, Grzegorz, Schneider, Philipp-Immanuel, Kayser, Yves, Siewert, Frank, Soltwisch, Victor
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits. Modern transistor architectures for e.g. FinFETs are realize
Externí odkaz:
http://arxiv.org/abs/2102.06600
Autor:
Andrle, Anna, Farchmin, Nando, Hagemann, Paul, Heidenreich, Sebastian, Soltwisch, Victor, Steidl, Gabriele
Grazing incidence X-ray fluorescence is a non-destructive technique for analyzing the geometry and compositional parameters of nanostructures appearing e.g. in computer chips. In this paper, we propose to reconstruct the posterior parameter distribut
Externí odkaz:
http://arxiv.org/abs/2102.03189
Autor:
Andrle, A., Hönicke, P., Vinson, J., Quintanilha, R., Saadeh, Q., Heidenreich, S., Scholze, F., Soltwisch, V.
The refractive index of a y-cut SiO$_2$ crystal surface is reconstructed from polarization dependent soft X-ray reflectometry measurements in the energy range from 45 eV to 620 eV. Due to the anisotropy of the crystal structure in the (100) and (001)
Externí odkaz:
http://arxiv.org/abs/2010.09436
Autor:
Hönicke, Philipp, Andrle, Anna, Kayser, Yves, Nikolaev, Konstantin V., Probst, Jürgen, Scholze, Frank, Soltwisch, Victor, Weimann, Thomas, Beckhoff, Burkhard
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional recons
Externí odkaz:
http://arxiv.org/abs/2005.02078
Akademický článek
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Autor:
Georg Tscheuschner, Marco Ponader, Christopher Raab, Prisca S. Weider, Reni Hartfiel, Jan Ole Kaufmann, Jule L. Völzke, Gaby Bosc-Bierne, Carsten Prinz, Timm Schwaar, Paul Andrle, Henriette Bäßler, Khoa Nguyen, Yanchen Zhu, Antonia S. J. S. Mey, Amr Mostafa, Ilko Bald, Michael G. Weller
Publikováno v:
Viruses, Vol 15, Iss 3, p 697 (2023)
The cowpea chlorotic mottle virus (CCMV) is a plant virus explored as a nanotechnological platform. The robust self-assembly mechanism of its capsid protein allows for drug encapsulation and targeted delivery. Additionally, the capsid nanoparticle ca
Externí odkaz:
https://doaj.org/article/7ea9125b32794c749ef2418c1055efeb
Autor:
Steffen Staeck, Anna Andrle, Philipp Hönicke, Jonas Baumann, Daniel Grötzsch, Jan Weser, Gesa Goetzke, Adrian Jonas, Yves Kayser, Frank Förste, Ioanna Mantouvalou, Jens Viefhaus, Victor Soltwisch, Holger Stiel, Burkhard Beckhoff, Birgit Kanngießer
Publikováno v:
Nanomaterials, Vol 12, Iss 21, p 3766 (2022)
Scan-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is an established technique for the investigation of the elemental depth-profiles of various samples. Recently it has been applied to investigating structured nanosamples in the tende
Externí odkaz:
https://doaj.org/article/c160345c9b7e483eb780a4046ab30d43