Zobrazeno 1 - 10
of 34
pro vyhledávání: '"Andrle, Anna"'
Autor:
Andrle, Anna, Hönicke, Philipp, Schneider, Philipp, Kayser, Yves, Hammerschmidt, Martin, Burger, Sven, Scholze, Frank, Beckhoff, Burkhard, Soltwisch, Victor
Publikováno v:
Proc. SPIE 11057, 110570M (2019)
For the reliable fabrication of the current and next generation of nanostructures it is essential to be able to determine their material composition and dimensional parameters. Using the grazing incidence X-ray fluoresence technique, which is taking
Externí odkaz:
http://arxiv.org/abs/2104.13749
Autor:
Saadeh, Qais, Naujok, Philipp, Philipsen, Vicky, Hönicke, Philipp, Laubis, Christian, Buchholz, Christian, Andrle, Anna, Stadelhoff, Christian, Mentzel, Heiko, Schönstedt, Anja, Soltwisch, Victor, Scholze, Frank
The optical constants of ruthenium in the spectral range 8 nm to 23.75 nm with their corresponding uncertainties are derived from the reflectance of a sputtered ruthenium thin film in the Extreme Ultraviolet (EUV) spectral range measured using monoch
Externí odkaz:
http://arxiv.org/abs/2103.11868
Autor:
Andrle, Anna, Hönicke, Philipp, Gwalt, Grzegorz, Schneider, Philipp-Immanuel, Kayser, Yves, Siewert, Frank, Soltwisch, Victor
The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits. Modern transistor architectures for e.g. FinFETs are realize
Externí odkaz:
http://arxiv.org/abs/2102.06600
Autor:
Andrle, Anna, Farchmin, Nando, Hagemann, Paul, Heidenreich, Sebastian, Soltwisch, Victor, Steidl, Gabriele
Grazing incidence X-ray fluorescence is a non-destructive technique for analyzing the geometry and compositional parameters of nanostructures appearing e.g. in computer chips. In this paper, we propose to reconstruct the posterior parameter distribut
Externí odkaz:
http://arxiv.org/abs/2102.03189
Autor:
Hönicke, Philipp, Andrle, Anna, Kayser, Yves, Nikolaev, Konstantin V., Probst, Jürgen, Scholze, Frank, Soltwisch, Victor, Weimann, Thomas, Beckhoff, Burkhard
The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional recons
Externí odkaz:
http://arxiv.org/abs/2005.02078
Autor:
Staeck, Steffen, Andrle, Anna, Hönicke, Philipp, Baumann, Jonas, Grötzsch, Daniel, Weser, Jan, Goetzke, Gesa, Jonas, Adrian, Kayser, Yves, Förste, Frank, Mantouvalou, Ioanna, Viefhaus, Jens, Soltwisch, Victor, Stiel, Holger, Beckhoff, Burkhard, Kanngießer, Birgit
Scan-free grazing-emission X-ray fluorescence spectroscopy (GEXRF) is an established technique for the investigation of the elemental depth-profiles of various samples. Recently it has been applied to investigating structured nanosamples in the tende
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3c9542909b777698e9246624290d4046
Akademický článek
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Autor:
Robinson, John C., Sendelbach, Matthew J., Hönicke, Philipp, Kayser, Yves, Soltwisch, Victor, Wählisch, Andre, Wauschkuhn, Nils, Scheerder, Jeroen E., Fleischmann, Claudia, Bogdanowicz, Janusz, Charley, Anne-Laure, Veloso, Anabela, Loo, Roger, Mertens, Hans, Hikavyy, Andriy, Siefke, Thomas, Andrle, Anna, Gwalt, Grzegorz, Siewert, Frank, Ciesielski, Richard, Beckhoff, Burkhard
Publikováno v:
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124961J-124961J-7, 1124657p
Akademický článek
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Autor:
Kasprowicz, Bryan S., Liang, Ted, Saadeh, Qais, Mesilhy, Hazem, Soltwisch, Victor, Erdmann, Andreas, Ciesielski, Richard, Lohr, Leonhard, Andrle, Anna, Philipsen, Vicky, Thakare, Devesh, Laubis, Christian, Scholze, Frank, Kolbe, Michael
Publikováno v:
Proceedings of SPIE; December 2022, Vol. 12293 Issue: 1 p122930Y-122930Y-12, 12170083p