Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Andrew V. Miakonkikh"'
Autor:
Kristina A. Malsagova, Tatyana O. Pleshakova, Andrey F. Kozlov, Ivan D. Shumov, Mikhail A. Ilnitskii, Andrew V. Miakonkikh, Vladimir P. Popov, Konstantin V. Rudenko, Alexander V. Glukhov, Igor N. Kupriyanov, Nina D. Ivanova, Alexander E. Rogozhin, Alexander I. Archakov, Yuri D. Ivanov
Publikováno v:
Biosensors, Vol 8, Iss 3, p 72 (2018)
Application of micro-Raman spectroscopy for the monitoring of quality of high-k (h-k) dielectric protective layer deposition onto the surface of a nanowire (NW) chip has been demonstrated. A NW chip based on silicon-on-insulator (SOI) structures, pro
Externí odkaz:
https://doaj.org/article/10bab3cd530d48258be7c21b7d47ceff
Autor:
Olga O. Permiakova, Alexander E. Rogozhin, Andrew V. Miakonkikh, Elizaveta A. Smirnova, Konstantin V. Rudenko
Publikováno v:
Microelectronic Engineering. 275:111983
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::295dbdbc8eff03a22738f45db6d1ef3b
https://doi.org/10.1016/j.mee.2023.111983
https://doi.org/10.1016/j.mee.2023.111983