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pro vyhledávání: '"Andrew R. Lingley"'
Autor:
Tony S. Pan, Hsin-I Lu, Arvind Kannan, Rich Gorski, Yong Sun, Max N. Mankin, Andrew T. Koch, Clark Stephen E, Andrew R. Lingley, Morgan Monroe
Publikováno v:
2017 30th International Vacuum Nanoelectronics Conference (IVNC).
We used photolithography to fabricate nanoscale grids in proximity to a metal electrode. Such nanoscale grids can be used to mitigate the space charges in the inter-electrode region of a thermionic converter. The nanoscale dimensions together with lo
Publikováno v:
2016 29th International Vacuum Nanoelectronics Conference (IVNC).
We developed a fabrication process that incorporates self-aligned double patterning to produce nanoscale electrostatic grids in close proximity to an electrode. These nanoscale grids can be used to mitigate the effects of space charge in the inter-el