Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Andrew E. Bair"'
Publikováno v:
SPIE Proceedings.
The effect of lens aberrations on the process windows of a 248 nm stepper is presented for multiple locations within the exposure field and for various illumination conditions. It is shown that the effect on the process window depends on the field lo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0920641b1037f4db3eb54c2aab5669c
https://doi.org/10.1117/12.310818
https://doi.org/10.1117/12.310818
Autor:
Hiroshi Matsui, Jeffrey R. Johnson, Von Jerick T. Marcos, Audrey M. Davis, Andrew E. Bair, Charles R. Spinner, Steve Tanner, Bradley D. Lantz
Publikováno v:
SPIE Proceedings.
Preventing the formation of defects at the interface between an organic bottom-side anti-reflective coating and a photoresist is problematic with the use of these films. These defects have been attributed to different sources, such as mismatch of sur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56afbe412fd6763771231665320b71dd
https://doi.org/10.1117/12.312463
https://doi.org/10.1117/12.312463
Autor:
Charles R. Spinner, Jeffrey R. Johnson, Andrew E. Bair, Audrey M. Davis, Ralph R. Dammel, Peter D. Nunan, A Mark
Publikováno v:
SPIE Proceedings.
The effects of increasing bottom-side anti-reflective coating (BARC) thickness on the CD distribution within a device are presented. In conjunction with the increasing BARC thickness, reductions in the photoresist thickness are shown to be beneficial
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e6382e9bdc854edcfe88592675c39f9
https://doi.org/10.1117/12.276019
https://doi.org/10.1117/12.276019
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