Zobrazeno 1 - 1
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pro vyhledávání: '"Andreas Hamerich"'
Publikováno v:
Surface and Coatings Technology. 59:212-216
Plasma-enhanced metal organic chemical vapour deposition of thin copper films at low substrate temperatures using copper-acetylacetonate is investigated for deposition on temperature-sensitive substrates. Films with electrical resistivity near bulk v
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::71f6f9d790ae0c14331692f1052ac7e3
https://doi.org/10.1016/0257-8972(93)90085-3
https://doi.org/10.1016/0257-8972(93)90085-3
