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pro vyhledávání: '"Andrea Ledermann"'
Publikováno v:
Thin Solid Films. 395:61-65
The scale-up of hot-wire CVD of a-Si:H based solar cells requires knowledge of how gas supply and filament geometry affect the deposition process. In this paper we report the important role of gas supply configuration and how it affects the uniformit
Publikováno v:
Thin Solid Films. 395:298-304
Thermo-catalytic (TC) or hot-wire (HW) chemical vapor deposition (CVD) is a promising technique for growing amorphous and microcrystalline silicon films with improved stability and high rates. In this paper we report on the photovoltaic (PV) applicat