Plasma Parameters Obtained with Planar Probe and Optical Emission Spectroscopy

Autor: Andre M. Daltrini, Patrick Verdonck, Laura Swart, Stanislav A. Moshkalev

Publikováno v: Journal of Integrated Circuits and Systems. 2:67-73

A planar probe and optical emission spectroscopy were employed to analyze parameters in an inductively coupled plasma (ICP). The analyses were performed in Ar, Ar+SF6 and O2 plasmas at 40 mTorr. Typical probe results indicate an ion current of 10-3 A

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8ef1a184093c768c8b90e5ad1d7d52c3
https://doi.org/10.29292/jics.v2i2.266

Foundry Polymer-Based Inverted-Rib Waveguides

Autor: Roberto R. Panepucci, E. A. M. A. Van Etten, Andre M. Daltrini, R. C. G. da Silva, Celio A. Finardi, Talita S. Burger, Gilliard N. Malheiros-Silveira

Publikováno v: 2018 SBFoton International Optics and Photonics Conference (SBFoton IOPC).

Development of polymer inverted-rib waveguides based on high-volume CMOS foundry process is presented. Simulation of waveguiding structures using a basic inverted waveguide manufacturing process showed that viable devices can be obtained. Full wafers

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3cd2a7b4db290b5bbe8b6e5b8ec91fc1
https://doi.org/10.1109/sbfoton-iopc.2018.8610902

Plasma Diagnostics in an Inductively Coupled Plasma - Gaseous Electronics Conference Reference Cell

Autor: Stanislav A. Moshkalev, Thomas Morgan, Robert Piejak, Andre M. Daltrini, William Graham

Publikováno v: ECS Transactions. 14:365-373

An Inductively Coupled Plasma - Gaseous Electronics Conference reference cell was studied by different diagnostics: laser induced fluorescence, Langmuir probe, optical emission spectroscopy (Ar line ratios) and coil electrical measurements. Two modes

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0e1cda127a91b1236c46b39566576ff3
https://doi.org/10.1149/1.2956051

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

Autor: S. A. Moshkalev, R. B. Piejak, Andre M. Daltrini, T. J. Morgan, William Graham

Publikováno v: Daltrini, A M, Moshkalev, S A, Morgan, T J, Piejak, R B & Graham, W G 2008, ' Plasma power measurement and hysteresis in the E-H transition of a rf inductively coupled plasma system ', Applied Physics Letters, vol. 92, no. 6, 061504 . https://doi.org/10.1063/1.2844885

An experimental investigation of the argon plasma behavior near the E-H transition in an inductively coupled Gaseous Electronics Conference reference cell is reported. Electron density and temperature, ion density, argon metastable density, and optic

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c646517b3b61e5132c0fd93c288919c0
https://doi.org/10.1063/1.2844885