Zobrazeno 1 - 10
of 40
pro vyhledávání: '"Ando Manabu"'
Autor:
Inaba, Takuro, Kurashima, Yuichi, Pahlovy, Shahjada A., Miyamoto, Iwao, Ando, Manabu, Numata, Atsushi
Publikováno v:
In Microelectronic Engineering 2009 86(4):497-499
Publikováno v:
In Microelectronic Engineering May-June 2008 85(5-6):1193-1196
Autor:
Ando Manabu, Hidekazu Mimura, Changling Liu, Yasuaki Fukuda, Kazushi Nomura, Yuzo Mori, Masahiko Kanaoka, Kazuto Yamauchi, Hideo Takino
Publikováno v:
Surface and Interface Analysis. 40:1002-1006
Extreme ultraviolet (EUV) lithography is currently being developed as a next-generation lithography system. In this system, light at a wavelength of 13.4 nm is used, allowing the patterning of lines with dimensions of less than 40 nm. To focus the li
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dba47c248d5dc582771bda217eea4a7c
https://doi.org/10.1002/sia.2818
https://doi.org/10.1002/sia.2818
Publikováno v:
The Review of Laser Engineering. 27:25-29
This paper describes an overview of the manufacture and measurement of aspherical mirrors for X-ray optics. In X-ray lithography and astronomical observation, to which X-ray optics are typically applied, especially in EUV lithography that uses extra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::95e714f4b1ac46cc2292753aee821a81
https://doi.org/10.2184/lsj.27.25
https://doi.org/10.2184/lsj.27.25
Publikováno v:
Journal of the Japan Society for Precision Engineering. 62:408-412
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09d0bbfda1aceec0c4f7a6f1f5a563de
https://doi.org/10.2493/jjspe.62.408
https://doi.org/10.2493/jjspe.62.408
Publikováno v:
Nanotechnology. 6:111-120
This paper discusses super-smooth polishing technology researched and developed for excimer lasers, soft X-rays, and other short-wavelength light applications. Short-wavelength light requires surface quality and contour accuracy superior to tradition
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2945f04672295db33b369cfcb3456731
https://doi.org/10.1088/0957-4484/6/4/002
https://doi.org/10.1088/0957-4484/6/4/002
Publikováno v:
Nanotechnology. 6:139-147
For the purpose of fabricating free-form optical elements to an accuracy of 80 nm PV, the CSSP (Canon Super-Smooth Polisher) has been developed. This device finishes workpieces by alternately repeating contour measuring and corrective polishing. In s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cbea507b93783cd37931f226b080124e
https://doi.org/10.1088/0957-4484/6/4/006
https://doi.org/10.1088/0957-4484/6/4/006
Publikováno v:
Journal of the Japan Society for Precision Engineering. 61:1393-1396
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4d9bae7a6b3bb4bc9ea074ab81ad0bce
https://doi.org/10.2493/jjspe.61.1393
https://doi.org/10.2493/jjspe.61.1393
Autor:
Akinobu Deguchi, Hironori Yamamoto, Masafumi Takimoto, Hiroji Narumi, Ando Manabu, Mahito Negishi, Nobuo Nakamura
Publikováno v:
SPIE Proceedings.
For the purpose of fabricating free-form optical elements with the accuracy of 80 nm PV, the Canon Super-Smooth Polisher has been developed. It has a high resolution on-machine coordinate measuring system that utilizes a contact probe. A unique probe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f5c2b7d54c8f6e9faed7f9c59e413dfb
https://doi.org/10.1117/12.215612
https://doi.org/10.1117/12.215612
Publikováno v:
SPIE Proceedings.
This paper discusses super-smooth polishing technology for excimer lasers, soft X-rays, and other short-wavelength light applications. Short-wavelength light elements require surface quality and contour accuracy superior to traditional specifications
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ec6219e3253ae9df04862e160807019
https://doi.org/10.1117/12.215613
https://doi.org/10.1117/12.215613