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Reflectance anisotropy spectroscopy as a tool for mechanical characterization of metallic thin films
Autor:
Matthias Schamel, Michael Hohage, Richard Denk, Peter Zeppenfeld, Alla S. Sologubenko, Ralph Spolenak, Andi Wyss
Publikováno v:
Journal of Physics D: Applied Physics. 48:415303
In the present work reflectance anisotropy spectroscopy (RAS) is evaluated as a new tool for the mechanical characterization of metallic thin films on viscoelastic substrates. Cu and Cu–Zn thin films of thicknesses in the range from 50 to 1000 nm w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f6e60aba1ee6398a5f232092bf2449fb
https://doi.org/10.1088/0022-3727/48/41/415303
https://doi.org/10.1088/0022-3727/48/41/415303
