Zobrazeno 1 - 10
of 47
pro vyhledávání: '"Anatoly Bourov"'
Publikováno v:
Optik. 124:5513-5516
Previously, we reported a technique for in situ projection lens aberration measurement based on principal component analysis of aerial images (AMAI-PCA). The sampling approach of this technique has a great impact on the measurement range and accuracy
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 26:2192-2196
In recent years, the anomalous transmission of subwavelength apertures has become an emergent subject within the physical sciences. While the gain mechanism of these structures is still uncertain, the effect has been observed in several studies. Simi
Publikováno v:
SPIE Proceedings.
With decreasing of critical dimension (CD), the availability of depth of focus (DOF) goes down from technology node to technology node. Monitoring and controling of scanner focus on product wafers will be necessary. A technique entitled Iso-Dense Foc
An adaptive denoising method utilizing weighted least-square (WLSQ) is proposed for an aberration measurement (AM) method based on aerial images (AI). In the aberration measurement process, the WLSQ method is employed to obtain the principal componen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b03f532e789dc30ee21327a0a5a71b44
https://publica.fraunhofer.de/handle/publica/233390
https://publica.fraunhofer.de/handle/publica/233390
Autor:
Jishuo Yang, Andreas Erdmann, Lifeng Duan, Xiangzhao Wang, Sikun Li, Guanyong Yan, Anatoly Bourov, Dongbo Xu
Publikováno v:
SPIE Proceedings.
An in-situ aberration measurement technique based on aerial image with optimized source is proposed. A linear relationship between aerial image and Zernike coefficients is established by principle component analysis and regression analysis. The linea
Autor:
Sikun Li, Dongbo Xu, Jishuo Yang, Andreas Erdmann, Anatoly Bourov, Xiangzhao Wang, Lifeng Duan, Guanyong Yan
Publikováno v:
SPIE Proceedings.
A novel technique (AMAI-Quad) for aberration extraction of lithographic projection based on quadratic relationship model between aerial-image intensity distribution and Zernike coefficients is proposed. Zernike coefficients in this case represent the
Publikováno v:
SPIE Proceedings.
Control of CD uniformity is a key aspect of IC manufacturing. Ability to accurately predict wafer-measured CD prior to exposure is critical to CDU control. In this paper we present a method to calculate a predicted CD value based on in-situ measureme
Publikováno v:
SPIE Proceedings.
In this paper, we propose a method named as AMAI-PCA to extract aberration levels using aerial image measurements and present its experimental results on lithographic tools. Based on physical simulation and statistical analysis, a linear regression m
Publikováno v:
Optics express. 19(19)
We propose a novel in situ aberration measurement technique for lithographic projection lens by use of aerial image based on principal component analysis (AMAI-PCA). The aerial image space, principal component space and Zernike space are introduced t
Publikováno v:
SPIE Proceedings.
In this paper, we present a streamlined aerial image model that is linear with respect to projection optic's aberrations. The model includes the impact of the NA, partial coherence, as well as the aberrations on the full aerial image as measured on a