Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Anastasiya Gorshkova"'
Publikováno v:
Materials Science Forum. 977:238-243
This paper presents a modeling of technology aspects for fabrication ceramic microelectromechanical systems (MEMS) microhotplate and surface mounting device (SMD) packaging for (MOX) gas sensors applications. Innovative claims include: demonstration
Autor:
Anastasiya Gorshkova, Konstantin Oblov, Maya Etrekova, Nikolay Samotaev, Anastasia Ivanova, Denis Veselov
Publikováno v:
Materials Science Forum. 977:272-276
This article presents the technological aspects of experiments on the stable topological patterns formation from thin films of platinum on ceramic membranes. Platinum thin films were deposited by magnetron sputtering on a clean or pre-activated laser
Autor:
Alexander Pisliakov, Csaba Ducso, Ferenc Biro, Pavel Dzhumaev, Nikolay Samotaev, Anastasiya Gorshkova, István Bársony
Publikováno v:
Materials Today: Proceedings. 30:443-447
Micro-catalytic gas sensors are essential devices for detection of combustive gases up to lower explosion limit (LEL). Micro-catalytic gas sensors capable to detect hydrocarbons below 50 mW power consumption at 550 °C operation temperature were deve
Publikováno v:
Physics of Atomic Nuclei. 82:1508-1512
The flexible laser micromilling technology for ceramic MEMS production of microhotplates in the surface mount device (SMD) package is described. Current results demonstrate that using described technology makes it possible to manufacture all parts of
Autor:
Mykola Vinnichenko, Marco Fritsch, Mihails Kusnezoff, Sindy Mosch, Nikolai Trofimenko, Konstantin Oblov, Lena Wissmeier, Anastasiya Gorshkova, Franz-Marin Fuchs, Nikolay Samotaev
The progress of the Internet of Things stimulates the development of sensors of small size and low power consumption. Miniaturized metal-oxide semiconductor (MOX) gas sensors (e.g. methane, hydrogen or carbon monoxide detection) can be integrated int
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1095e167bbfb9854e571d040f281ccc0
https://publica.fraunhofer.de/handle/publica/264804
https://publica.fraunhofer.de/handle/publica/264804
Publikováno v:
2019 IEEE 31st International Conference on Microelectronics (MIEL).
this work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possib