Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Anastasia S. Bondarenko"'
Publikováno v:
Physics Letters A. 381:472-475
A physicochemical model for reactive magnetron sputtering of a metal target is described in this paper. The target temperature in the model is defined as a function of the ion current density. Synthesis of the coating occurs due to the surface chemic
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6fab1f1a7db37aa5a2766cfca9449c28
https://doi.org/10.1016/j.physleta.2016.11.028
https://doi.org/10.1016/j.physleta.2016.11.028
Autor:
Viktor I. Shapovalov, Vitaliy V. Karzin, A. E. Komlev, Pavel B. Baykov, Anastasia S. Bondarenko
Publikováno v:
Physics Letters A. 380:882-885
Heating and cooling processes of the substrate during the DC magnetron sputtering of the copper target were investigated. The sensitive element of a thermocouple was used as a substrate. It was found, that the heat outflow rate from the substrate is
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c06a25e5bdb2dc97a2852eeda552ba89
https://doi.org/10.1016/j.physleta.2015.12.021
https://doi.org/10.1016/j.physleta.2015.12.021