Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Amitha Govindaraju"'
Publikováno v:
Journal of Micromechanics and Microengineering. 15:1303-1309
In this work, a new method was developed to increase the stiffness of polydimethylsiloxane (PDMS) masters using SU-8 truss structures, aimed at reducing residual deformations of the PDMS masters induced in the molding process. Using this method, both
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc618b856a32a4870560a642cb629d0a
https://doi.org/10.1088/0960-1317/15/6/023
https://doi.org/10.1088/0960-1317/15/6/023
Autor:
Thomas D. Schneider, Robert C. White, John Garra, Cheng Luo, Amitha Govindaraju, John F. Currie, Makarand Paranjape
Publikováno v:
Sensors and Actuators A: Physical. 114:123-128
We have successfully developed a new method to release SU-8 structures with polystyrene as a sacrificial material. Toluene is initially used to dissolve solid polystyrene, and the resulting solution is employed to spin coat a sacrificial polystyrene
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::01b4996596a0f1b8a5cbbf83120da25f
https://doi.org/10.1016/j.sna.2004.02.042
https://doi.org/10.1016/j.sna.2004.02.042
Publikováno v:
SPIE Proceedings.
In this work, a new method was developed to increase the stiffness of PDMS (Polydimethylsiloxane) masters using Si plates, aimed at reducing residual deformations of the PDMS masters induced in the molding process. Using this method, both global and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::51b734fd66fc4f32600db67ea661d875
https://doi.org/10.1117/12.600324
https://doi.org/10.1117/12.600324