Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Amir Wachs"'
Autor:
Jin Hee Park, Jonathan R. Bakke, Mark Lee, Shashank Sharma, Nam-Sung Kim, Ellie Yeh, Tae Hong Ha, Jianxin Lei, Wenting Hou, Raymond Hung, Amir Wachs, Karthik Raman Sharma
Publikováno v:
2018 IEEE International Interconnect Technology Conference (IITC).
Extending tungsten contact for the most advanced nodes (≤ 7 nm) is challenging due to the growing impact of contact resistance on the overall resistance of a device and to the increasing difficulty of gapfill in features with < 20 nm critical dimen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eb0150ad1624fc756a3529a32218e17e
https://doi.org/10.1109/iitc.2018.8430434
https://doi.org/10.1109/iitc.2018.8430434
Autor:
Jennifer Tseng, Zhiyuan Wu, Kevin Moraes, Lee Joung Joo, Abhinav Kumar, Amir Wachs, Mehul Naik, Kourosh Nafisi, Dror Shemesh, Jorge Pablo Fernandez
Publikováno v:
2018 IEEE International Interconnect Technology Conference (IITC).
We present here our studies on using electron beams to locate copper fill voids in dual damascene structures down to 10nm CD. It is shown that the e-beam technique can be optimized for detecting embedded voids in non-destructive manner that enables f
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b601d0a7fd7d2509f7233f988780b5eb
https://doi.org/10.1109/iitc.2018.8457123
https://doi.org/10.1109/iitc.2018.8457123
Autor:
Jennifer Tseng, Nikolaos Bekiaris, Amir Wachs, Abhinav Kumar, Dror Shemesh, Raymond Hung, Kuchik Vadim, K. Nafisi, Jonathan R. Bakke, Michael Chudzik, A. Litman, A. Karnieli, Nicolas Breil, Mehul Naik, Jin Hee Park, N. Khasgiwale, Jorge Pablo Fernandez
Publikováno v:
2017 IEEE International Electron Devices Meeting (IEDM).
Inline detection of embedded voids within Middle-Of-Line (MOL) cobalt metal lines is a major industry gap at 7nm technology node and below, for both developing the new metallization solutions, as well as for monitoring during ramp and production. We
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d5a7fd4954084b74ea64d4073d4a27ab
https://doi.org/10.1109/iedm.2017.8268391
https://doi.org/10.1109/iedm.2017.8268391
Publikováno v:
Solid State Phenomena. :189-192
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a23e6edce1210c3744dcf82dce17919a
https://doi.org/10.4028/www.scientific.net/ssp.103-104.189
https://doi.org/10.4028/www.scientific.net/ssp.103-104.189
Publikováno v:
AIChE Journal. 46:1825-1836
Principal component analysis (PCA), which is widely used in process monitoring, performs best when the system variables are linearly correlated. However, in practice, the variables are often nonlinearly related, and may be subject to periodic forcing
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::586d25ed7a6894428a18e5e8502593ba
https://doi.org/10.1002/aic.690460911
https://doi.org/10.1002/aic.690460911
Publikováno v:
International Journal of Multiphase Flow. 26:1-15
A phenomenological model describing the resuspension of polydisperse suspension in shear flow is presented. The model combines mechanisms of hindered sedimentation and shear-induced particle migration. The latter is expressed in terms of migration po
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aff4ac893e71e64338f991cae5e8d65d
https://doi.org/10.1016/s0301-9322(98)00086-x
https://doi.org/10.1016/s0301-9322(98)00086-x
Autor:
Amir Wachs, Daniel R. Lewin
Publikováno v:
AIChE Journal. 45:1688-1700
Principal component analysis (PCA) is a powerful technique for constructing reduced-order models based on process measurements, obtained by the rotation of the measurement space. These models can be subsequently utilized for chemical-process monitori
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::526a6a759615666523769ad9a86a221b
https://doi.org/10.1002/aic.690450808
https://doi.org/10.1002/aic.690450808
Publikováno v:
Journal of Rheology. 42:1329-1348
The shear-induced particle migration in a polydisperse concentrated suspension is described using migration potentials for the various particle size fractions. The model is applied to solve the flow patterns and the particle concentration distributio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::21f110c09c1e2f06b7331728dcd8d208
https://doi.org/10.1122/1.550963
https://doi.org/10.1122/1.550963
Publikováno v:
Computers & Chemical Engineering. 21:S601-S606
The Karr column is an apparatus for countercurrent liquid-liquid extraction equipped with reciprocating perforated plates. This arrangement improves local mass transfer between the organic and aqueous phases. This system has been reported to be highl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::819661198ac66a7a15b5004808d6a972
https://doi.org/10.1016/s0098-1354(97)87568-0
https://doi.org/10.1016/s0098-1354(97)87568-0
Autor:
Amir Wachs
Publikováno v:
SPIE Proceedings.
The following paper describes a modular monitoring approach for the photolithography environment, which takes individual measurements and generates three-level monitor. This method is aiming to simplify the process monitoring activity and make it mor
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7e43ca356719e212fc3e7ef9083ab5f0
https://doi.org/10.1117/12.386509
https://doi.org/10.1117/12.386509