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pro vyhledávání: '"Amir Len"'
Autor:
Jan Kaiser, Elad Sommer, Igal Ben-Dayan, Frank Voss, Goeran Fleischer, Dirk Schöne, Galit Zuckerman, Amir Len, Uwe Kramer, Roman Kris, Alessandra Navarra, Stefano Ventola, Shalev Dror
Publikováno v:
SPIE Proceedings.
CD-SEMs fleet matching is a widely discussed subject and various approaches and procedures to determine it were described in the literature [1,2,4-6]. The different approaches for matching are all based on statistical treatment of CD measurements tha
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0a55bcc893a4d72953e045fb33a6a213
https://doi.org/10.1117/12.776865
https://doi.org/10.1117/12.776865
