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pro vyhledávání: '"Amina Sidhoum"'
Autor:
Darcy Hart, Amina Sidhoum, Arnaud Garnier, Sandra Bos, Justin Miller, Nicolas Devanciard, Gilles Vera, Franck Bana, Carlos Beitia, N. Bresson, Dario Alliata, John Thornell, Scott Balak, Stephane Rey
Publikováno v:
International Symposium on Microelectronics. 2016:000032-000037
When combined with in-line local metrology, Automatic Visual Inspection/Classification is a powerful tool to characterize 3D interconnect processes, either at the R&D level or in volume manufacturing environments. A new methodology that uses visual i