Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Amada Wilkison"'
Autor:
Itty Matthew, Amada Wilkison, Todd P. Lukanc, Cyrus E. Tabery, Makoto Takahashi, Marina V. Plat
Publikováno v:
Optical Microlithography XVIII.
Patterning of dense gratings with sub-wavelength pitches presents a challenge that can be addressed using Resolution Enhancement Techniques (RETs) such as dipole illumination, with the dipole axis perpendicular to the dense line orientation. However,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::03ae8a8917204d0ff7910400dfef291d
https://doi.org/10.1117/12.606444
https://doi.org/10.1117/12.606444
Publikováno v:
SPIE Proceedings.
Early insertion of ArF nm lithography will occur at the 130 nm node in 2001. Process development for the 100 nm node will also occur this year. Both aggressive gate length reductions and minimum pitch design rules below 250 nm present immediate chall
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c21ce06ce817b58c771e841ff818ef1e
https://doi.org/10.1117/12.435785
https://doi.org/10.1117/12.435785
Publikováno v:
SPIE Proceedings.
Early insertion of ArF nm lithography will occur at the 130 nm node in 2001. Process development for the 100nm node will also occur this year. Both aggressive gate length reductions and minimum pitch design rules below 250nm present immediate challen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bda57b5effe87cfd11c06c2e7b304fb6
https://doi.org/10.1117/12.425202
https://doi.org/10.1117/12.425202
Publikováno v:
SPIE Proceedings.
Resolution, R, in optical lithography is often described by the Rayleigh equation: R equals k1(lambda) /NA. Since the 0.25 um generation there has been a trend of aggressive gate length reduction for high performance devices. Leading edge logic techn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::475eb945f8e575bac2d028cf00fc5a32
https://doi.org/10.1117/12.389009
https://doi.org/10.1117/12.389009
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