Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Alon Litman"'
Autor:
Neta Shomrat, Konstantin Chirko, Inbal Weisbord, Yan Avniel, Sergey Khristo, David Nessim, Alon Litman, Tamar Segal-Peretz
Publikováno v:
Journal of Micro/Nanopatterning, Materials, and Metrology. 21
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::36b142b08da37a5765fab98436114643
https://doi.org/10.1117/1.jmm.21.2.021202
https://doi.org/10.1117/1.jmm.21.2.021202
Autor:
Lior Shoval, Vladislav Kudriashov, Ilan Englard, Alon Litman, C. C. Lin, Ran Brikman, Greg Hughes, Alex Goldenshtein, Shmoolik Mangan
Publikováno v:
SPIE Proceedings.
Extreme ultraviolet (EUV) e-beam patterned mask inspection (EBPMI) has been proposed by Applied Materials as a cost-effective solution for high volume manufacturing (HVM) in mask shops and fabs. Electron beam inspection technology is currently availa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b6c6fbc6b1d86eae23e4cd9fe426c492
https://doi.org/10.1117/12.898854
https://doi.org/10.1117/12.898854
Publikováno v:
SPIE Proceedings.
The characteristics of BSE emission at low beam energies (0.5 to 5 kV) are discussed with reference to signal intensity, topographic contrast, material contrast, charging phenomena, and metrology issues. Experimental results are presented for a back-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5b11f66e46b5d4c6f30592603fd3200d
https://doi.org/10.1117/12.174121
https://doi.org/10.1117/12.174121