Výsledky vyhledávání - "Allwyn Boustheen"

Improving after-etch overlay performance using high-density in-device metrology in DRAM manufacturing

Autor: Seung-Woo Koo, Jung-Il Hwang, Hyun-Sok Kim, Rizvi Rahman, Kwang-Young Hu, Dong-Jin Lee, Min-Shik Kim, Raheleh Pishkari, In-Ho Joo, Dong-Hak Lee, Jae-Wuk Ju, Allwyn Boustheen, Ik-Hyun Jeong, Marc Hauptmann, Paul Böcker, Kang-San Lee, Kang-Min Lee, Cees Lambregts, Young-Sik Kim

Publikováno v: Metrology, Inspection, and Process Control for Microlithography XXXIV.

In advanced DRAM semiconductor manufacturing, there is a need to reduce the overlay fingerprints. Reducing on device fingerprints with very high spatial frequency remains one of the bottlenecks to achieve sub-2nm on device overlay. After-etch device

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a8882fbb7d4f4224fc01c899081e8b10
https://doi.org/10.1117/12.2552028

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A modular microvalve suitable for lab on a foil : manufacturing and assembly concepts

Autor: F.G.A. Homburg, Andreas Dietzel, A Allwyn Boustheen

Publikováno v: Microelectronic Engineering, 98, 638-641. Elsevier

Graphical abstractDisplay Omitted Highlights? A modular layered microvalve with: active, membrane and passive layer is presented. ? It employs phase change actuation using paraffin and is structured in plastic foils. ? Component layers are distinct a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::efc89ff29aa8bf0c04fe4e32eb9fd9ba
https://research.tue.nl/nl/publications/b420965d-94a9-4469-a5a5-f7c7cb128c62

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A layered modular polymeric μ-valve suitable for lab-on-foil : design, fabrication, and characterization

Autor: Fga Erik Homburg, Andreas Dietzel, Mgam Somhorst, A Allwyn Boustheen

Publikováno v: Microfluidics and Nanofluidics, 11(6), 663-673. Springer

Cost-effective fabrication of microfluidic networks require that all components have to be manufactured with up-scalable processes such as reel-to-reel fabrication of foil-based devices. A microvalve design must take into account functional requireme

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3c44658f42dc68e3486871128f8f962c
https://research.tue.nl/nl/publications/8c38cb43-64f7-4bb3-bdd2-7ccaad717d96

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