Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Allen G. Owen"'
Autor:
Alecsander D. Mshar, Allen G. Owen, Daniel D. Arnold, Pieter B. Visscher, Randy K. Dumas, Subhadra Gupta
Publikováno v:
AIP Advances, Vol 12, Iss 3, Pp 035230-035230-5 (2022)
We have studied the use of self-assembled block copolymers to pattern multilayers of Co and Pd on silicon wafers. Stacks ranging from four to twelve bilayers of Co (0.3 nm)/Pd (0.8 nm) were sputtered onto Ta/Pd seed layers and capped with 3 nm of Ta
Externí odkaz:
https://doaj.org/article/5e881951c2ea4d92a7d078d5c5e70d47
Publikováno v:
TMS 2015 144th Annual Meeting & Exhibition ISBN: 9783319486086
TMS2015 Supplemental Proceedings
TMS2015 Supplemental Proceedings ISBN: 9781119093466
TMS2015 Supplemental Proceedings
TMS2015 Supplemental Proceedings ISBN: 9781119093466
A statistical Design of Experiments was carried out on the nanopatterning of Co/Pd multilayers using block copolymer templating and ion milling. The multilayers were patterned into welldefined 30 nm nanopillars. The effect of varying ion mill beam po
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f7ad953df3efcdadd4fa41f1d3c922d8
https://doi.org/10.1007/978-3-319-48127-2_38
https://doi.org/10.1007/978-3-319-48127-2_38
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 35:061801
Co/Pd multilayered films with perpendicular magnetic anisotropy were patterned using block copolymer templating. Two methods of achieving phase separation of the block copolymer were compared. A matrix study of etch time and etch angle was carried ou
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::63bb9c661e2d583047134bb8f57eb740
https://doi.org/10.1116/1.5004150
https://doi.org/10.1116/1.5004150
Autor:
Hao Su, Samuel C. Schwarm, Subhadra Gupta, Angelique Montgomery, Robert L. Douglas, Allen G. Owen
Publikováno v:
Journal of Applied Physics. 116:113906
The (111) orientation preferred L10 FePtB has been obtained by post-deposition annealing sputtered FeB/Pt multilayers on thermally oxidized silicon substrates. Block copolymer templating was employed to pattern FeBPt film. A matrix study of etch time
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aa57396ae9c666c305ae8668fca9a48a
https://doi.org/10.1063/1.4895850
https://doi.org/10.1063/1.4895850
Autor:
Mshar, Alecsander D., Owen, Allen G., Arnold, Daniel D., Visscher, Pieter B., Dumas, Randy K., Gupta, Subhadra
Publikováno v:
AIP Advances; Mar2022, Vol. 12 Issue 3, p1-5, 5p
Autor:
Su, Hao, Schwarm, Samuel C., Douglas, Robert L., Montgomery, Angelique, Owen, Allen G., Gupta, Subhadra
Publikováno v:
Journal of Applied Physics; 2014, Vol. 116 Issue 11, p113906-1-113906-4, 4p, 2 Color Photographs, 4 Graphs
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov2017, Vol. 35 Issue 6, p1-6, 6p
The TMS 2015 Annual Meeting Supplemental Proceedings is a collection of papers from the TMS 2015 Annual Meeting & Exhibition, held March 15-19 in Orlando, Florida, USA. The papers in this volume represent 33 symposia from the meeting. This volume, al