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Publikováno v:
Journal of Failure Analysis and Prevention. 11:455-465
Explosions and fire incidents involving portable plastic gasoline containers manufactured for consumer use are known to occur frequently and are verified in databases, engineering literature, legal briefs, and newspapers. This project studied such in
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 16:3563
Critical dimension (CD) control for isolated lines has been experimentally studied as a function of aerial image slope and proximity effects on a photomask. The aerial image slope was controlled by defocusing a 50 kV shaped beam. Isolated crosses of
Conference
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