Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Alfons Zöller"'
Autor:
Mark Schürmann, Josephine Wolf, Lars Mechold, Kai Starke, Martin Bischoff, Michael Kennedy, Henrik Ehlers, Thomas Hegemann, Olaf Stenzel, Norbert Kaiser, S Schippel, Florian Carstens, Tobias Nowitzki, R Rauhut, Rüdiger Foest, Detlev Ristau, J. Harhausen, Holger Reus, Jens Schumacher, Harro Hagedorn, Alfons Zöller, Steffen Wilbrandt
Publikováno v:
Applied optics. 56(4)
Random effects in the repeatability of refractive index and absorption edge position of tantalum pentoxide layers prepared by plasma-ion-assisted electron-beam evaporation, ion beam sputtering, and magnetron sputtering are investigated and quantified
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b6bc3845f59b35984bc1b3859f8571b7
https://pubmed.ncbi.nlm.nih.gov/28158073
https://pubmed.ncbi.nlm.nih.gov/28158073
Publikováno v:
Optical Interference Coatings 2016.
High throughput and accuracy of a PIAD coating system with a large dome and an advanced RF-plasma source is demonstrated. Thickness monitoring was performed with a newly developed wideband monitoring system.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a7f66eec7ff31a7e64ae6f5ed7e670b5
https://doi.org/10.1364/oic.2016.wa.8
https://doi.org/10.1364/oic.2016.wa.8
Autor:
Jens Harhausen, Kai Starke, Olaf Stenzel, Roman Rauhut, Lars Mechold, Mark Schürmann, Josephine Wolf, Holger Reus, Rüdiger Foest, Detlev Ristau, Martin Bischoff, Michael Kennedy, Harro Hagedorn, Henrik Ehlers, Florian Carstens, Steffen Wilbrandt, Alfons Zöller, Tobias Nowitzki, Jens Schumacher, Norbert Kaiser, Thomas Hegemann, Stefan Schippel
Publikováno v:
Optical Interference Coatings 2016.
Random effects in the reproducibility of refractive index and absorption edge position of Ta2O5 layers prepared by plasma-ion assisted electron beam evaporation, ion beam sputtering, and magnetron sputtering are investigated and quantified.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3ade94e69f46f0dfe883f2bb7d9e485d
https://doi.org/10.1364/oic.2016.thd.2
https://doi.org/10.1364/oic.2016.thd.2
Autor:
Alfons Zöller
Publikováno v:
Vakuum in Forschung und Praxis. 19:6-10
Single wavelength optical monitoring is frequently applied in large box coaters. In state of the art optical coating systems a testglass changer with stationary test glasses is used for thickness monitoring while the substrates are located on a rotat
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::71686508c017e8e6cc2521ce15f1f9b7
https://doi.org/10.1002/vipr.200700317
https://doi.org/10.1002/vipr.200700317
Publikováno v:
SPIE Proceedings.
A newly developed wideband optical monitoring system is based on a fast triggered spectrometer with a high dynamic array detector with low signal noise. It is useful for fast in-situ transmittance measurements on the rotating substrate holder during
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::63adfee3f5da2bf1117f81423bd550ed
https://doi.org/10.1117/12.2191269
https://doi.org/10.1117/12.2191269
Publikováno v:
SPIE Proceedings.
A new, highly efficient impedance matching network is introduced , increasing the LION300 RF-source efficiency by approximately 20% and enabling considerably higher SiO2 rates for the production of shift-free and low scattering interference filters.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4a74c3c27e83460fb8a61a401dc80689
https://doi.org/10.1117/12.2191344
https://doi.org/10.1117/12.2191344
Autor:
Alfons Zöller
Publikováno v:
Vakuum in Forschung und Praxis. 9:19-24
Ein plasmaunterstutztes Aufdampfverfahren zur Herstellung optisch wirksamer dunner Schichten fuhrt bereits bei niederen Substrattemperaturen zu hervorragenden Schichteigenschaften. Anhand der Untersuchungen von Einzelschichten im Vergleich zum konven
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1fd6eb90e4c02bed34f5c2bb7499655
https://doi.org/10.1002/vipr.19970090106
https://doi.org/10.1002/vipr.19970090106
Publikováno v:
Optical Interference Coatings.
The performance of a PIAD process with RF-plasma source in a large box coater is investigated in respect to high performance coatings. UV-IR cut and BP-filters with low losses are presented.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc51dfc02a6f7529cd9da90410092b36
https://doi.org/10.1364/oic.2010.mb8
https://doi.org/10.1364/oic.2010.mb8
Autor:
Alfons Zöller, Boris Romanov, Jennifer D. T. Kruschwitz, Michael K. Trubetskov, Michael Boos, Harro Hagedorn, Alexander V. Tikhonravov
Publikováno v:
Optifab 2007: Technical Digest.
The success of fabrication of optical coatings depends on a proper choice of a theoretical coating design and on the choice of monitoring strategy that provides low thickness errors for the chosen design. Software tools described in this presentation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5d6337f9b4fc5ff986e9f94b5a3070e3
https://doi.org/10.1117/12.718119
https://doi.org/10.1117/12.718119
Publikováno v:
Optical Interference Coatings.
The performance of a new large rf-plasma source for large box coaters is investigated in respect to layer performance and achievable growth rates. The optical constants of SiO2 and TiO2 thin films are presented.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7ed7637426c957f250504ea0b4c74359
https://doi.org/10.1364/oic.2007.mb3
https://doi.org/10.1364/oic.2007.mb3